We demonstrate in this letter that an x‐ray diffraction pattern from a two‐dimensional surface grating of periods 0.3 μm can be obtained by means of white beam Laue photography using synchrotron radiation. Such photographs or images can provide direct and useful information on the shape of the grating pillars as well as the crystalline quality of the grating material.

1.
I.
Tapfer
and
P.
Grambow
,
Appl. Phys. A
50
,
3
(
1990
).
2.
A. T.
Macrander
and
S. E.
Slusky
,
Appl. Phys. Lett.
56
,
443
(
1990
).
3.
M.
Tolan
,
G.
Konig
,
L.
Biugemann
,
W.
Press
,
F.
Brinkop
, and
J. P.
Kotthaus
,
Europhys. Lett.
20
,
223
(
1992
).
4.
M.
Gailhanou
,
T.
Baumbach
,
U.
Marti
,
P. C.
Silva
,
F. K.
Reinhart
, and
M.
Ilegems
,
Appl. Phys. Lett.
62
,
1623
(
1993
).
5.
P.
van der Sluis
,
J. J. M.
Binsma
, and
T.
van Dongen
,
Appl. Phys. Lett.
62
,
3186
(
1993
).
6.
Qun
Shen
,
C. C.
Umbach
,
B.
Weselak
, and
J. M.
Blakely
,
Phys. Rev. B
48
,
17967
(
1993
).
7.
M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1989).
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