We investigate the doping behavior of ZnSe/ZnTe short period superlattices. p‐type doping is achieved with a dc nitrogen plasma source, n‐type doping with chlorine from a ZnCl2 Knudsen source. Even a small Te content has a strong positive effect on p doping: Doping levels in the upper 1019 cm−3 range are achieved, and ohmic contacts can be obtained even for low carrier concentrations. The data are in excellent agreement with a theory based on the amphoteric native defect model. The opposite is valid for n doping: At Te concentrations above 20% electron concentrations are below 1016 cm−3. As a possible way to get both good n‐ and p‐type doping at the same lattice constant we propose the use of the quaternary compound Zn(1−y)Mg(y)Se(1−x)Te(x).
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16 May 1994
Research Article|
May 16 1994
Doping of zinc‐selenide‐telluride
W. Faschinger;
W. Faschinger
Institut für Halbleiterphysik, Universität Linz, Austria
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S. Ferreira;
S. Ferreira
Institut für Experimentalphysik, Universitat Linz, Austria
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H. Sitter
H. Sitter
Institut für Experimentalphysik, Universitat Linz, Austria
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Appl. Phys. Lett. 64, 2682–2684 (1994)
Article history
Received:
November 29 1993
Accepted:
February 28 1994
Citation
W. Faschinger, S. Ferreira, H. Sitter; Doping of zinc‐selenide‐telluride. Appl. Phys. Lett. 16 May 1994; 64 (20): 2682–2684. https://doi.org/10.1063/1.111490
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