We investigate the doping behavior of ZnSe/ZnTe short period superlattices. p‐type doping is achieved with a dc nitrogen plasma source, n‐type doping with chlorine from a ZnCl2 Knudsen source. Even a small Te content has a strong positive effect on p doping: Doping levels in the upper 1019 cm−3 range are achieved, and ohmic contacts can be obtained even for low carrier concentrations. The data are in excellent agreement with a theory based on the amphoteric native defect model. The opposite is valid for n doping: At Te concentrations above 20% electron concentrations are below 1016 cm−3. As a possible way to get both good n‐ and p‐type doping at the same lattice constant we propose the use of the quaternary compound Zn(1−y)Mg(y)Se(1−x)Te(x).

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