We have designed and fabricated a thin‐film flux transformer by a YBa2Cu3O7/SrTiO3 (YBCO/STO) multilayer process. The flux transformer consists of a 20‐turn input coil of 10 μm linewidth and a single‐turn pickup loop surrounding an area of 7.5 by 7.5 mm2. All device levels are patterned by standard photolithography and Ar‐ion‐beam etching. The flux transformer has been combined in flip‐chip configuration with the square washer of a low‐noise YBCO dc SQUID. The dc SQUID magnetometer exhibits a magnetic field sensitivity of 1.4 nT/Φ0. The intrinsic white flux noise level of 70μΦ0/√Hz at 77 K is mainly dominated by the SQUID corresponding to a magnetic field resolution of the magnetometer of 100 fT/√Hz for frequencies above 40 Hz. At 1 Hz we measured 200 fT/√Hz. Biomagnetic measurements were performed in a magnetically shielded chamber.
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8 November 1993
Research Article|
November 08 1993
Highly sensitive YBa2Cu3O7 dc SQUID magnetometer with thin‐film flux transformer Available to Purchase
D. Grundler;
D. Grundler
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
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B. David;
B. David
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
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R. Eckart;
R. Eckart
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
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O. Dössel
O. Dössel
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
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D. Grundler
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
B. David
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
R. Eckart
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
O. Dössel
Philips GmbH Forschungslaboratorien, Forschungsabteilung Technische Systeme Hamburg, Röntgenstrasse 24‐26, D‐22335 Hamburg, Germany
Appl. Phys. Lett. 63, 2700–2702 (1993)
Article history
Received:
July 06 1993
Accepted:
September 03 1993
Citation
D. Grundler, B. David, R. Eckart, O. Dössel; Highly sensitive YBa2Cu3O7 dc SQUID magnetometer with thin‐film flux transformer. Appl. Phys. Lett. 8 November 1993; 63 (19): 2700–2702. https://doi.org/10.1063/1.110399
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