We have designed and fabricated a thin‐film flux transformer by a YBa2Cu3O7/SrTiO3 (YBCO/STO) multilayer process. The flux transformer consists of a 20‐turn input coil of 10 μm linewidth and a single‐turn pickup loop surrounding an area of 7.5 by 7.5 mm2. All device levels are patterned by standard photolithography and Ar‐ion‐beam etching. The flux transformer has been combined in flip‐chip configuration with the square washer of a low‐noise YBCO dc SQUID. The dc SQUID magnetometer exhibits a magnetic field sensitivity of 1.4 nT/Φ0. The intrinsic white flux noise level of 70μΦ0/√Hz at 77 K is mainly dominated by the SQUID corresponding to a magnetic field resolution of the magnetometer of 100 fT/√Hz for frequencies above 40 Hz. At 1 Hz we measured 200 fT/√Hz. Biomagnetic measurements were performed in a magnetically shielded chamber.

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