A tuned, cylindrical Langmuir probe was used to measure current‐voltage traces in a planar, inductive oxygen, radio frequency glow discharge at several pressures ranging from 0.5 to 10 mT. The plasma potentials were determined from the zero crossings of the trace second derivatives. Positive ion densities were evaluated using orbit motion limited probe theory; electron densities were estimated by integrating the area under the unnormalized distribution function. By applying the Druyvesteyn formula to the digitized probe traces, the electron energy distribution functions were obtained. The distribution functions ranged from Maxwellian at 0.5 mT to almost Druyvesteyn‐like at 10 mT.
REFERENCES
1.
2.
F. F. Chen, Plasma Diagnostic Techniques, edited by Huddlestone and Leonard (Academic, New York, 1965).
3.
4.
A. P.
Paranjpe
, J. P.
McVittie
, and S. A.
Self
, J. Appl. Phys.
67
, 6718
(1990
).5.
V. A. Godyak, Nato Advanced Study Institute Program on Plasma Surface Interaction and Processing of Materials, Alicante, Spain, Sept. 1988.
6.
W. M. Holber, Handbook of Ion Beam Processing Technology, Principles, Deposition, Film Modification and Synthesis, edited by J. J. Cuomo, S. M. Rossnagel, and H. R. Kaufmann (Noyes, New Jersey, 1989).
7.
8.
J. M.
Cook
, D. E.
Ibottson
, and D. L.
Flamm
, J. Vac. Sci. Technol. B
8
, 1
(1990
).9.
R. W.
Boswell
and R. K.
Porteous
, Appl. Phys. Lett.
50
, 1130
(1987
).10.
J. H. Keller, J. C. Forster, and M. S. Barnes, 41st Gaseous Electronics Conference, Urbana, Illinois, Oct. 1990 (unpublished).
11.
J. H. Keller, J. C. Forster, and M. S. Barnes, J. Vac. Sci. Technol. A (accepted for publication).
12.
13.
GRAFTOOL User’s Guide, 3-D Visions Corp., Redondo Beach, CA, 90277 (1989).
14.
This content is only available via PDF.
© 1993 American Institute of Physics.
1993
American Institute of Physics
You do not currently have access to this content.
