Y2O3 precipitates with typical sizes between 70 and 300 nm2 have been identified by high‐resolution electron microscopy and image calculations in mixed a‐ and c‐axis oriented YBa2Cu3O7 sputtered films. The precipitates are densely distributed (1015 cm−3), have tabular shape and grow epitaxially at boundaries between a‐ and c‐axis oriented grains, with the (001) Y2O3 plane parallel to the a, b plane of the a‐axis oriented grain and the (110) Y2O3 plane parallel to the a,b plane of the c‐axis oriented grain. Their largest interfacial facet lies parallel to the a,b plane of the a‐axis oriented regions. Lattice‐matching arguments show that energetically this situation is the most favorable one, which explains the nucleation of precipitates at a/c boundaries.

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