We have used pulsed excimer laser radiation at 248 nm to mix Ti layers into Si3N4 substrates. Mixed layers show formation of small grain TiN in a Si3N4 but no evidence of Ti‐Si compounds or free Si. Low fluence (∼1.0 J cm−2) processing results in minimal mixing as TiN formation at the interface impedes further diffusion. At higher fluence (≳2 J cm−2) complete and quite uniform mixing occurs. The mixed layer is of the order of 0.5 μm thick.
REFERENCES
1.
See for example: C. J. McHargue, R. Kossowsky, and W. O. Hofer, Structure-Property Relationships in Surface-Modified Ceramics, (Kluwer Academic, Dordrecht, 1989).
2.
C. J. McHargue, in: Structure-Property Relationships in Surface-Modified Ceramics, edited by C. J. McHargue, R. Kossowsky, and W. O. Hofer (Kluwer Academic, Dordrecht, 1989), p. 253.
3.
M.
Nastasi
, R.
Kossowsky
, J-P.
Hirvonen
, and N.
Elliott
, J. Mater. Res.
3
, 1127
(1988
).4.
R. R.
Reeber
, R. P.
Kusy
, N.
Yu
, and W.-K.
Chu
, Appl. Phys. Lett.
56
, 1075
(1990
).5.
T. R.
Jervis
, J-P.
Hirvonen
, and M.
Nastasi
, J. Mater. Res.
6
, 146
(1991
).6.
W.
Wei
, J.
Lankford
, I.
Singer
, and R.
Kossowsky
, Surf. Coat. Technol.
37
, 179
(1989
).7.
R. K.
Singh
, K.
Jagannadham
, and J.
Narayan
, J. Mater. Res.
3
, 1119
(1988
).8.
B. R. Appleton, in: Proceedings of the Second Workshop on Ion Mixing and Surface Layer Alloying, edited by D. M. Follstaedt, R. S. Averback, and M.-A. Nicolet, Sandia Report SAND85–2465, p. 99 (1986).
9.
C. J. McHargue (personal communication).
10.
M.
Nastasi
, J-P.
Hirvonen
, T. G.
Zocco
, and T. R.
Jervis
, J. Mater. Res.
5
, 1207
(1990
).11.
12.
T. R.
Jervis
, M.
Nastasi
, and J-P.
Hirvonen
, Proc. SPIE
1190
, 158
(1990
).13.
14.
T. R.
Jervis
, J-P.
Hirvonen
, M.
Nastasi
, and M. R.
Cohen
, Mater. Res. Soc. Symp. Proc.
157
, 395
(1990
).15.
I. L. Singer and J. H. Wandass, in Structure-Property Relationships in Surface-Modified Ceramics, edited by C. J. McHargue, R. Kossowsky, and W. O. Hofer (Kluwer Academic, Dordrecht, 1989), p. 199.
16.
R.
Tsu
, R. T.
Hodgson
, T. Y.
Tan
, and J. E.
Baglin
, Phys. Rev. Lett.
42
, 1356
(1979
).17.
18.
19.
J-P.
Hirvonen
, M.
Nastasi
, T. G.
Zocco
, and T. R.
Jervis
, J. Appl. Phys.
67
, 7292
(1990
).
This content is only available via PDF.
© 1992 American Institute of Physics.
1992
American Institute of Physics
You do not currently have access to this content.
