Mass and energy‐dispersive recoil spectrometry, where the recoil energy is derived from the recoil time of flight, has been used to characterize the depth distribution of Al, Ga, and As in an AlxGa(1−x)As quantum‐well structure. Signals characterizing the Al, Ga, and As distribution with good separation between Ga and As (average crosstalk <2%) could be obtained from depths less than 560 nm from the surface. The depth resolution of the As signal at the surface was 16 nm FWHM, which is considerably better than achieved using a silicon particle detector (34 nm).
REFERENCES
1.
A.
Chevarier
and N.
Chevarier
, Nucl. Instrum. Methods
218
, 1
(1983
).2.
M. R. Weller, M. H. Mendenhall, P. C. Haubert, M. Döbeli, and T. A. Tombrello, in Proceedings of High Energy and Heavy Ion Beams in Materials Analysis, Albuquerque, 1989, edited by J. R. Tesmer, C. J. Maggiore, M. Nastasi, J. C. Barbour, and J. W. Mayer (Materials Research Society, Pittsburgh, PA, 1990), p. 139.
3.
M.
Östling
and C. S.
Petersson
, Nucl. Instrum. Methods B
4
, 88
(1984
).4.
M.
Döbeli
, P. C.
Haubert
, R. P.
Livi
, S. J.
Spicklemire
, D. L.
Weathers
, and T. A.
Tombrello
, Nucl. Instrum. Methods B
56/57
, 764
(1991
).5.
M.
Döbeli
, P. C.
Haubert
, T. A.
Tombrello
, J.-I.
Chyi
, D.
Huang
, and H.
Morkoç
, Nucl. Instrum. Methods B
52
, 72
(1990
).6.
H. J.
Whitlow
, G.
Possnert
, and C. S.
Petersson
, Nucl. Instrum. Methods B
27
, 448
(1987
). [There is an error in Eq. (2) of this paper, it should be replaced by Eq. (2) in Ref. 17.7.
H. J.
Whitlow
, A. B. Ch.
Andersson
, and C. S.
Petersson
, Nucl. Instrum. Methods B
36
, 53
(1989
).8.
J. P.
Thomas
, M.
Fallavier
, and A.
Ziani
, Nucl. Instrum. Methods B
15
, 443
(1986
).9.
H. J. Whitlow, in Proceedings of High Energy and Heavy Ion Beams in Materials Analysis, Albuquerque, 1989, edited by J. R. Tesmer, C. J. Maggiore, M. Nastasi, J. C. Barbour, and J. W. Mayer (Materials Research Society, Pittsburgh, PA, 1990), p. 73.
10.
H. J. Whitlow, B. Jacobsson, and L. Westerberg, Nucl. Instrum. Methods A (In press).
11.
M.
Lindroos
and Ö.
Skeppstedt
, Nucl. Instrum. Methods A
306
, 225
(1991
).12.
M. H.
Mendenhall
and R. A.
Weller
, Nucl. Instrum. Methods B
40/41
, 1239
(1989
).13.
M. H.
Mendenhall
and R. A.
Weller
, Nucl. Instrum. Methods B
47
, 193
(1990
).14.
M.
Östling
, C. S.
Petersson
, P.
Johansson
, A.
Wikström
, and G.
Possnert
, Nucl. Instrum. Methods B
15
, 729
(1986
).15.
H. J. Whitlow, in Proceedings of High Energy and Heavy Ion Beams in Materials Analysis, Albuquerque, 1989, edited by J. R. Tesmer, C. J. Maggiore, M. Nastasi, J. C. Barbour, and J. W. Mayer (Materials Research Society, Pittsburgh, PA, 1990), p. 243.
16.
J. P.
Stoquert
, G.
Guillaume
, M.
Hage-Ali
, J. J.
Grob
, C.
Ganter
, and P.
Siffert
, Nucl. Instrum. Methods B
44
, 184
(1989
).17.
A. M.
Behrooz
, R. L.
Headrick
, L. E.
Seiberling
, and R. W.
Zurmühle
, Nucl. Instrum. Methods B
28
, 108
(1987
).
This content is only available via PDF.
© 1992 American Institute of Physics.
1992
American Institute of Physics
You do not currently have access to this content.
