Using Raman spectroscopy we have investigated the spacing of the electron subbands in nominally δ‐doped GaAs structures which show a considerable spread of the silicon dopant atoms along the growth direction. For optical excitation in resonance with the E00band gap, spin‐density intersubband excitations are observed. For excitation in resonance with the E1 band gap we find a strong enhancement of scattering by collective intersubband plasmon‐phonon modes. The measured energy spacings between the electron subbands deviate significantly from what is expected for ideal δ doping. Self‐consistent electronic subband calculations taking into account the spread of the dopant atoms along the growth direction, in contrast, yield a good quantitative agreement between calculated and measured subband spacings. This demonstrates the potential of intersubband Raman spectroscopy for the analysis of the spatial localization of dopant atoms in δ‐doped structures.

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