We report the successful p‐type doping of CdTe films with arsenic using the photoassisted molecular beam epitaxy growth technique. These doped epilayers were grown at substrate temperatures as low as 180 °C. The room‐temperature hole concentrations in the CdTe:As layers ranged from 7×1015 to 6.2×1018 cm3 as determined by van der Pauw–Hall effect measurements. We propose a doping mechanism responsible for the high p‐type doping levels observed in the films. The arsenic acceptor ionization energy was found to ∼58–60 meV using low‐temperature photoluminescence measurements.

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