Y‐Ba‐Cu‐O thin films (100–730 nm) with small grains and a smooth surface have been fabricated by rf diode sputtering. The values of transition temperature Tc and critical current density Jc for the film (730 nm thickness) on SrTiO3 are 65 K and 1.2×105 A/cm2 at 4.2 K, respectively. The thickness dependence of Tc and Jc for the patterned films shows that Tc and Jc are almost constant for films with a thickness d≥200 nm.
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© 1988 American Institute of Physics.
1988
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