Lattice relaxation in InAs epitaxial films, grown by molecular beam epitaxy on GaAs, has been studied by grazing‐incidence x‐ray diffraction, supplemented by insitu reflection electron diffraction. Inhomogeneous lattice distortion has been found in that the films consist of weakly and strongly strained regions, and the latter disappear with increasing film thickness. The (100) orientation is favored over the (110) in the formation of the strongly strained domains because of the relatively low elastic energies.

1.
J. W.
Matthews
and
A. E.
Blakeslee
,
J. Cryst. Growth
32
,
265
(
1976
);
J. W.
Matthews
and
A. E.
Blakeslee
,
27
,
118
(
1974
).,
J. Cryst. Growth
2.
E.
Kasper
and
H. J.
Herzog
,
Thin Solid Films
44
,
357
(
1977
).
3.
J. C.
Bean
,
L. C.
Feldman
,
A. T.
Fiery
,
S.
Nakahara
, and
I. K.
Robinson
,
J. Vac. Sci. Technol. A
2
,
436
(
1984
).
4.
F. J.
Grunthaner
,
M. Y.
Yen
,
R.
Fernandez
,
T. C.
Lee
,
A.
Madhukar
, and
B. F.
Lewis
,
Appl. Phys. Lett.
46
,
983
(
1985
);
RED study has been recently reported by F. J. Gruntharner, L. Eng, B. F. Lewis, R. Fernandez, M. Y. Yen, and A. Madukhar, at the 2nd International Conference on Superlattices, Microstructures and Microdevices, Göteborg, Aug. 1986.
5.
L.
Goldstein
,
F.
Glas
,
J. Y.
Marzin
,
M. N.
Charasse
, and
G.
LeRoux
,
Appl. Phys. Lett.
47
,
1099
(
1985
).
6.
H.
Munekata
,
L. L.
Chang
,
S. C.
Woronick
, and
Y. H.
Kao
,
J. Cryst. Growth
81
,
237
(
1987
).
7.
W. C.
Marra
,
P.
Eisenberger
, and
A. Y.
Cho
,
J. Appl. Phys.
50
,
6927
(
1979
).
8.
A.
Segmüller
,
Adv. X‐ray Anal.
29
,
353
(
1986
);
MRS Proc. Vol. 77 (in press);
International Conference on Metallurgical Coatings, San Diego, March 1987, Thin Solid Films (in press).
9.
Barrett and Massalski, in Structure of Metals (McGraw‐Hill, New York, 1966), p. 155.
10.
W. A.
Jesser
and
J. W.
Matthews
,
Philos. Mag.
15
,
1097
(
1967
).
11.
A. Segmüller and M. Murakami, in Analytical Techniques for Thin Films, Treaties on Material Science and Technology, edited by K. N. Tu and R. Rosenberg (Academic, New York, in press);
IBM Research Report No. 10077 (1983).
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