Infrared absorption of epitaxial type A and type B NiSi2 layers on Si(111) has been measured with photoacoustic spectroscopy. Type A silicides showed identical absorption as type B layers with corresponding thicknesses. The observed dependence of absorption on silicide thickness agrees with calculations based on no‐interface absorption, in sharp contrast to previous studies of nonepitaxial silicide interfaces. These results suggest that the densities of electronic states at epitaxial NiSi2 interfaces are below the detection limit of this technique, ∼1014 cm−2.
REFERENCES
1.
E. H. Rhoderick, Metal‐Semiconductor Contacts (Clarendon, Oxford, 1978).
2.
3.
4.
5.
E. H.
Nicollian
and A.
Goetzberger
, Bell Sys. Tech. J.
46
, 1055
(1967
).6.
J.
Werner
, K.
Ploog
, and H. J.
Queisser
, Phys. Rev. Lett.
57
, 1080
(1986
).7.
P. S.
Ho
, E. S.
Yang
, H. L.
Evans
, and X.
Wu
, Phys. Rev. Lett.
56
, 177
(1986
).8.
9.
J. Werner, R. T. Tung, A. F. J. Levi, and M. Anzlowar, Mater. Res. Soc. Symp. Proc. (1987) (in press).
10.
11.
D.
Cherns
, G. R.
Anstis
, J. L.
Hutchison
, and J. C. H.
Spence
, Philos. Mag. A
46
, 849
(1982
).12.
J. M.
Gibson
, J. C.
Bean
, J. M.
Poate
, and R. T.
Tung
, Appl. Phys. Lett.
41
, 818
(1982
).13.
14.
M.
Liehr
, P. E.
Schmidt
, F. K.
LeGoues
, and P. S.
Ho
, Phys. Rev. Lett.
54
, 2139
(1985
).15.
R. T.
Tung
, J. M.
Gibson
, and J. M.
Poate
, Phys. Rev. Lett.
50
, 429
(1983
).16.
R. J.
Hauenstein
, T. E.
Schlesinger
, T. C.
McGill
, B. D.
Hunt
, and L. J.
Schowalter
, Appl. Phys. Lett.
47
, 853
(1985
).17.
R. T.
Tung
, K. K.
Ng
, J. M.
Gibson
, and A. F. J.
Levi
, Phys. Rev. B
33
, 7077
(1986
).18.
H. von Känel, J. Henz, M. Ospelt, and P. Wachter, Phys. Scri. (Proc. 7th Euro. Phys. Soc., Pisa 1987).
19.
A.
Chantre
, A. F. J.
Levi
, R. T.
Tung
, W. C.
Dautremont‐Smith
, and M.
Anzlowar
, Phys. Rev. B
34
, 4415
(1986
).20.
21.
R. T.
Tung
, J. M.
Gibson
, and J. M.
Poate
, Appl. Phys. Lett.
42
, 888
(1983
).22.
A. Rosencwaig, Photoacoustics and Photoacoustic Spectroscopy (Wiley, New York, 1971).
23.
R. D.
Frampton
, E. A.
Irene
, and F. M.
d’Heurle
, J. Appl. Phys.
59
, 978
(1986
).24.
25.
A.
Zur
, T. C.
McGill
, and D. L.
Smith
, Phys. Rev. B
28
, 2060
(1983
).26.
This content is only available via PDF.
© 1987 American Institute of Physics.
1987
American Institute of Physics
You do not currently have access to this content.
