Efficient catalysts for hydrocarbon polymerization have been prepared photochemically by reaction of mixed TiCl4 and Al2(CH3)6 adsorbate layers, in the scanned focus of a 257.2‐nm laser beam. Monolayer coverages of the photodeposited catalyst have been shown effective for in situ patterned polymerization of ethylene and acetylene at room temperature from the vapor phase organic monomers. Three‐micrometer spatial resolution has been obtained in selected‐area polymer growth. The chemical kinetics of the mixed‐adsorbate reactions and the effects of compositional changes on the catalytic activity of the laser‐photodepostied films have been studied.
REFERENCES
1.
J. Y.
Tsao
and D. J.
Ehrlich
, J. Cryst. Growth
68
, 176
(1984
) and references therein.2.
C.
Arnone
, V.
Daneu
, and S.
Riva‐Sanseverino
, Appl. Phys. Lett.
37
, 1012
(1980
);D. J.
Ehrlich
, R. M.
Osgood
, Jr., and T. F.
Deutsch
, Appl. Phys. Lett.
38
, 946
(1981
).3.
4.
See, for example, G. Odian, Principles of Polymerization (Wiley‐Interscience, NY, 1981).
5.
A laser driven reaction is described in
J. Y.
Tsao
and D. J.
Ehrlich
, Appl. Phys. Lett.
42
, 997
(1983
).6.
G. Natta and F. Dannusso, eds., Stereoregular Polymers and Stereospecific Polymerizations, Vols. 1 and 2 (Pergamon, Oxford, 1967);
J. Boor, Jr., Ziegter‐Natta Catalysts and Polymerization (Academic, NY, 1979).
7.
W. Cooper, in Progress in High Polymers, Vol. 1, edited by J. C. Robb and F. W. Peaker (Heywood and Co., London, 1961), pp. 79–340.
8.
9.
D. J. Ehrlich and J. Y. Tsao, in VLSI Electronics: Microstructure Science, Vol. 7, edited by N. G. Einspruch (Academic, NY, 1984), pp. 129–164.
10.
11.
J. Y.
Tsao
, R. A.
Becker
, D. J.
Erhlich
, and F. J.
Leonberger
, Appl. Phys. Lett.
42
, 559
(1983
);D. J. Ehlich and J. Y. Tsao, in Surface Studies with Lasers, Springer Series in Chemical Physics, Vol. 33, edited by F. R. Aussenegg, A. Leitner, and M. E. Lippitsch (Springer, Berlin, 1983).
12.
J. Y. Tsao and D. J. Ehrlich (unpublished).
13.
See, for example, G. A. Somorjai, Chemistry in Two Dimensions: Surfaces (Cornell University, Ithaca, 1981).
This content is only available via PDF.
© 1985 American Institute of Physics.
1985
American Institute of Physics
You do not currently have access to this content.
