Efficient indium tin oxide (ITO)/polycrystalline silicon heterojunction solar cells have been fabricated utilizing neutralized ion‐beam sputtering techniques. These cells were fabricated on single‐pass float‐zone‐refined silicon. Conversion efficiencies of 6.25% under AM1 illumination have been observed. Cells were analyzed by I‐V characteristics and a scanning laser photoresponse technique. Qualitative minority‐carrier lifetime has been mapped using the EBIC mode of a SEM. This has revealed a reduced photoresponse at the grain boundaries independent of grain size, and also at defect clusters within individual grains. Surface blemishes and etch pits are not important in reducing the cell photoresponse. It appears that the low‐temperature processing inherent in semiconductor‐insulator‐semiconductor solar cells is applicable to polycrystalline material.

Topics
Current-voltage characteristic, Crystallographic defects, Materials treatment, Polycrystalline material, Semiconductor materials, Sputter deposition, Lasers, Solar cells, Chemical compounds
1.
H. J. Hovel, Semiconductors and Semimetals (Academic, New York, 1975), Vol. II.
2.
J. Lindmayer, 12th IEEE Photovoltaic Spec. Conf., 1976 (IEEE, New York, 1976), p. 82.
3.
C. T. Sah and F. A. Lindholm, in Ref. 2, p. 93.
4.
L. L.
Kazmerski
,
F. R.
White
,
M. S.
Ayyagari
,
Y. J.
Juang
, and
R. P.
Patterson
,
J. Vac. Sci. Technol.
14
,
65
(
1977
).
Crossref
Search ADS
 
5.
H. Fischer, Proceedings of the International Photovoltaic Solar Energy Conference Luxembourg, p. 52 (unpublished).
6.
C.
Lanza
 and
H. J.
Hovel
,
IEEE Trans. Electron Devices
ED‐24
,
392
(
1977
).
7.
T. L. Chu, DOE Photovoltaic Semiannual Review Meeting, Washington, D.C, 1978 (unpublished).
8.
L. M.
Fraas
,
J. Appl. Phys.
49
,
871
(
1978
).
Crossref
Search ADS
 
9.
H. C.
Card
 and
E. S.
Yang
,
IEEE Trans. Electron Devices
ED‐24
,
397
(
1977
).
10.
K.
Nakamura
 and
M.
Kamoshida
,
J. Appl. Phys.
48
,
5349
(
1977
).
Crossref
Search ADS
 
11.
J. B. DuBow and J. Shewchun, Proceedings of the ERDA Semiannual Solar Photovoltaic Program Review Meeting, Golden, Colo. 1977 (unpublished).
12.
J. H. Matlock, Proceedings of the National Workshop on Low Cost Polycrystalline Silicon Solar Cells, Dallas, 1976 (unpublished).
13.
J. B.
DuBow
,
D. E.
Burk
, and
J. R.
Sites
,
Appl. Phys. Lett.
29
,
494
(
1976
).
Crossref
Search ADS
 
14.
A. Genis, G. Cheek, and J. DuBow (unpublished).
15.
J. C.
Fan
,
F. J.
Bachner
 and
G. H.
Foley
,
Appl. Phys. Lett.
31
,
773
(
1977
).
Crossref
Search ADS
 
16.
J.
Shewchun
,
J.
DuBow
,
A.
Myszkowski
, and
R.
Singh
,
J. Appl. Phys.
49
,
855
(
1978
).
Crossref
Search ADS
 
17.
H. Brandhorst, ERDA/NASA/1022‐77/16, 1977 (unpublished).
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1978
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