The mid-infrared (MIR) waveband is significant for chemical and biological sensing since it covers several atmospheric windows and molecular fingerprint regions. On-chip photonic integrated one-dimensional (1D) microcavities have great potential for high-performance mid-IR sensing because of their high sensitivity and compact structure. However, high-performance 1D microcavities based on the promising silicon-on-sapphire (SoS) MIR platform have not yet been designed or realized. Based on the photonic band structure induced by 1D photonic crystals (PhC), a high-performance Bragg reflector, an inward apodized Bragg grating, and a free spectral range (FSR)-free PhC microcavity integrated system operating in the MIR waveband were developed on the SoS platform. By carefully designing the period and penetration depth of the corrugation in the Bragg reflector, a stopband of 45 nm and an extinction ratio of −12 dB were achieved. The inward apodized Bragg grating was optimized by adjusting the apodization depth and the number of periods, resulting in a quality factor of 1043 at a wavelength of 3088.4 nm. Furthermore, introducing a Fabry–Pérot (F-P) cavity between two Bragg reflectors (with side-coupled light) and precisely tuning the stopband of the Bragg reflector and the FSR of the F-P cavity enabled the realization of an FSR-free PhC microcavity. This microcavity exhibited a single deep resonance dip with subnanometer bandwidth across a record-wide operational waveband from 3025 to 3200 nm, achieving a quality factor of approximately 5090. The MIR 1D PhC microcavities on the SoS platform hold great promise for high-performance gas detection and molecular sensing in future applications.
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Realization and simulation of silicon-on-sapphire mid-infrared one-dimensional photonic crystal cavities
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13 January 2025
Research Article|
January 13 2025
Realization and simulation of silicon-on-sapphire mid-infrared one-dimensional photonic crystal cavities
Special Collection:
Mid and Long Wavelength Infrared Photonics, Materials, and Devices
Yalan Si
;
Yalan Si
(Data curation, Investigation, Methodology, Writing – original draft)
1
The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University
, Hangzhou 310027, China
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Zezhao Ju;
Zezhao Ju
(Software, Validation, Writing – original draft)
1
The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University
, Hangzhou 310027, China
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Hui Ma;
Hui Ma
(Methodology, Writing – original draft)
1
The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University
, Hangzhou 310027, China
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Kai Xia;
Kai Xia
(Validation)
2
Laboratory of Infrared Materials and Devices, Advanced Technology Research Institute, Ningbo University
, Ningbo 315211, Zhejiang, China
3
Ningbo Institute of Oceanography
, Ningbo 315832, Zhejiang, China
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Shuo Lin;
Shuo Lin
(Software)
1
The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University
, Hangzhou 310027, China
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Renjie Tang
;
Renjie Tang
(Software, Writing – review & editing)
4
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University
, Hangzhou, Zhejiang 310030, China
5
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, Westlake Institute for Optoelectronics
, Fuyang, Hangzhou, Zhejiang 311421, China
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Boshu Sun;
Boshu Sun
(Writing – review & editing)
4
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University
, Hangzhou, Zhejiang 310030, China
5
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, Westlake Institute for Optoelectronics
, Fuyang, Hangzhou, Zhejiang 311421, China
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Chunlei Sun;
Chunlei Sun
(Software, Writing – review & editing)
4
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University
, Hangzhou, Zhejiang 310030, China
5
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, Westlake Institute for Optoelectronics
, Fuyang, Hangzhou, Zhejiang 311421, China
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Lan Li
;
Lan Li
(Writing – review & editing)
4
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University
, Hangzhou, Zhejiang 310030, China
5
Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, Westlake Institute for Optoelectronics
, Fuyang, Hangzhou, Zhejiang 311421, China
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Peilong Yang
;
Peilong Yang
a)
(Funding acquisition)
2
Laboratory of Infrared Materials and Devices, Advanced Technology Research Institute, Ningbo University
, Ningbo 315211, Zhejiang, China
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Hongtao Lin
Hongtao Lin
a)
(Conceptualization, Funding acquisition, Supervision, Writing – review & editing)
1
The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University
, Hangzhou 310027, China
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Appl. Phys. Lett. 126, 021101 (2025)
Article history
Received:
September 29 2024
Accepted:
December 28 2024
Citation
Yalan Si, Zezhao Ju, Hui Ma, Kai Xia, Shuo Lin, Renjie Tang, Boshu Sun, Chunlei Sun, Lan Li, Peilong Yang, Hongtao Lin; Realization and simulation of silicon-on-sapphire mid-infrared one-dimensional photonic crystal cavities. Appl. Phys. Lett. 13 January 2025; 126 (2): 021101. https://doi.org/10.1063/5.0241260
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