This work explores the infrared (IR) detection capabilities of 750 nm thick Z-cut lithium niobate (LN) thin film resonator at asymmetric modes of various orders: the first, third, fifth, and seventh order asymmetric (A1, A3, A5, and A7), with resonant frequencies of 2.35, 6.68, 11.09, and 15.49 GHz. Under the infrared radiation of 0.575 mW, the responses about admittance minima and frequency drift corresponding to these modes have been experimentally validated. Notably, the A1 mode exhibits the most significant admittance dip response with 2.62 dB, while the A7 mode demonstrates a maximum frequency drift response of 670 kHz. The optimal parameter for noise equivalent power reaches 15.41 pW/Hz1/2, and the optimal detectivity achieves 7.40 × 106 m Hz1/2/W. These findings indicate the immense potential of LN thin-film resonators for infrared sensing applications.

1.
A.
Rogalski
,
Infrared Phys.
43
,
187
210
(
2002
).
2.
A. R.
Will-Cole
,
A. E.
Hassanien
,
S. D.
Calisgan
,
M.-G.
Jeong
,
X.
Liang
,
S.
Kang
,
V.
Rajaram
,
I.
Martos-Repath
,
H.
Chen
,
A.
Risso
,
Z.
Qian
,
S. M.
Seyed Abrishami
,
N.
Lobandi
,
M.
Rinaldi
,
S.
Gong
, and
N. X.
Sun
,
J. Appl. Phys.
131
(
24
),
241101
(
2022
).
3.
R. H.
Hadfield
,
Nat. Photonics
3
(
12
),
696
705
(
2009
).
4.
P. G.
Datskos
,
N. V.
Lavrik
, and
S.
Rajic
,
Rev. Sci. Instrum.
75
(
4
),
1134
1148
(
2004
).
5.
T.
Frach
,
G.
Prescher
,
C.
Degenhardt
,
R.
De Gruyter
,
A.
Schmitz
, and
R.
Ballizany
, in
IEEE Nuclear Science Symposium Conference Record (NSS/MIC)
(
IEEE
,
Orlando, FL
,
2009
), pp.
1959
1965
.
6.
N.
Sclar
,
27th Annual Technical Symposium
(
San Diego
,
1983
), pp.
11
41
.
7.
A.
Rogalski
,
J. Appl. Phys.
93
(
8
),
4355
4391
(
2003
).
8.
D.
Randjelović
,
A.
Petropoulos
,
G.
Kaltsas
,
M.
Stojanović
,
Ž.
Lazić
,
Z.
Djurić
, and
M.
Matić
,
Sens. Actuators, A
141
(
2
),
404
413
(
2008
).
9.
P. L.
Richards
,
J. Appl. Phys.
76
(
1
),
1
24
(
1994
).
10.
M.
Aleksandrova
,
C.
Jagtap
,
V.
Kadam
,
S.
Jadkar
,
G.
Kolev
,
K.
Denishev
, and
H.
Pathan
,
Eng. Sci.
16
,
82
89
(
2021
).
11.
X.
Le
,
Q.
Shi
,
P.
Vachon
,
E. J.
Ng
, and
C.
Lee
,
J. Micromech. Microeng.
32
(
1
),
014005
(
2022
).
12.
J.
Zhu
,
X.
Liu
,
Q.
Shi
,
T.
He
,
Z.
Sun
,
X.
Guo
,
W.
Liu
,
O. B.
Sulaiman
,
B.
Dong
, and
C.
Lee
,
Micromachines
11
(
1
),
7
(
2019
).
13.
S. D.
Calisgan
,
S.
Kang
,
V.
Rajaram
,
Z.
Qian
, and
M.
Rinaldi
, in
20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
(
IEEE
,
Berlin, Germany
,
2019
), pp.
637
640
.
14.
M.
Rais-Zadeh
,
SPIE Defense, Security, and Sensing
(
Baltimore
,
Maryland, USA
), pp.
83731M
.
15.
Z.
Wang
,
X.
Qiu
,
S. J.
Chen
,
W.
Pang
,
H.
Zhang
,
J.
Shi
, and
H.
Yu
,
Thin Solid Films
519
(
18
),
6144
6147
(
2011
).
16.
W. C.
Ang
,
P.
Kropelnicki
,
Y.
Zhu
,
A. B.
Randles
,
Y. A.
Gu
,
K. C.
Leong
, and
C. S.
Tan
,
Appl. Phys. Lett.
104
(
20
),
201110
(
2014
).
17.
V. J.
Gokhale
,
C.
Figueroa
,
J. M. L.
Tsai
, and
M.
Rais-Zadeh
, in
28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
(
IEEE
,
Estoril, Portugal
,
2015
), pp.
73
76
.
18.
Z.
Qian
,
V.
Rajaram
,
S.
Kang
, and
M.
Rinaldi
,
Appl. Phys. Lett.
115
(
26
),
261102
(
2019
).
19.
Y.
Hui
and
M.
Rinaldi
, in
Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)
(
IEEE
,
Prague, Czech Republic
,
2013
), pp.
62
65
.
20.
Z.
Qian
,
S.
Kang
,
V.
Rajaram
, and
M.
Rinaldi
, in
IEEE SENSORS
(
IEEE
,
Orlando, FL
,
2016
).
21.
Z.
Qian
,
Y.
Hui
,
F.
Liu
,
S.
Kang
,
S.
Kar
, and
M.
Rinaldi
,
Microsyst. Nanoeng.
2
(
1
),
16026
(
2016
).
22.
Z.
Qian
,
V.
Rajaram
,
S.
Kang
, and
M.
Rinaldi
, in
Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
(
IEEE
,
Besancon
,
2017
), pp.
500
501
.
23.
Y.
Hui
and
M.
Rinaldi
, in
Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
(
IEEE
,
Barcelona, Spain
,
2013
), pp.
968
971
.
24.
X.
Bao
,
S.
Sherrit
,
C.
Frez
,
V.
Scott
, and
M.
Rais-Zadeh
, in
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
, edited by
K.-W.
Wang
,
H.
Sohn
,
H.
Huang
, and
J. P.
Lynch
(
SPIE
,
Denver
,
2019
), p.
85
.
25.
M.
Moosavifar
,
A.
Ansari
, and
M.
Rais-Zadeh
, in
IEEE SENSORS
(
IEEE
,
Orlando, FL
,
2016
).
26.
W. C.
Ang
,
P.
Kropelnicki
,
H.
Campanella
,
Y.
Zhu
,
A. B.
Randles
,
H.
Cai
,
Y. A.
Gu
,
K. C.
Leong
, and
C. S.
Tan
, in
IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
(
IEEE
,
San Francisco, CA
,
2014
), pp.
688
691
.
27.
C.
Chen
,
Z.
Shang
,
F.
Zhang
,
H.
Zhou
,
J.
Yang
,
D.
Wang
,
Y.
Chen
, and
X.
Mu
,
Appl. Phys. Lett.
112
(
24
),
243501
(
2018
).
28.
X.
Li
,
J.
Liang
,
H.
Zhang
,
X.
Yang
,
H.
Zhang
,
W.
Pang
, and
M.
Zhang
,
Appl. Phys. Lett.
110
(
26
),
263502
(
2017
).
29.
S.
Xu
,
Z.
Ren
,
B.
Dong
,
J.
Zhou
,
W.
Liu
, and
C.
Lee
,
Adv. Opt. Mater.
11
(
4
),
2202228
(
2023
).
30.
V.
Plessky
,
S.
Yandrapalli
,
P. J.
Turner
,
L. G.
Villanueva
,
J.
Koskela
, and
R. B.
Hammond
,
Electron. Lett.
55
(
2
),
98
100
(
2019
).
31.
Y.
Yang
,
R.
Lu
,
T.
Manzaneque
, and
S.
Gong
, in
IEEE International Frequency Control Symposium (IFCS)
(
IEEE
,
Olympic Valley, CA
,
2018
).
32.
Y.
Yang
,
R.
Lu
,
L.
Gao
, and
S.
Gong
,
IEEE Trans. Microwave Theory Tech.
68
(
12
),
5211
5220
(
2020
).
33.
Y.
Yang
,
L.
Gao
,
R.
Lu
, and
S.
Gong
,
IEEE Trans. Ultrason., Ferroelectr., Freq. Control
68
(
5
),
1930
1937
(
2021
).
34.
K.
Liu
,
Y.
Lu
, and
T.
Wu
,
IEEE Electron Device Lett.
44
(
2
),
305
308
(
2023
).
35.
M.-H.
Li
,
C.-Y.
Chen
,
R.
Lu
,
Y.
Yang
,
T.
Wu
, and
S.
Gong
,
J. Microelectromech. Syst.
28
(
5
),
799
809
(
2019
).
36.
Z.
Qian
,
Y.
Hui
,
F.
Liu
,
S.
Kai
, and
M.
Rinaldi
, in
18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
(
IEEE
,
Anchorage, AK
,
2015
), pp.
1429
1432
.
37.
Y.
Hui
,
J. S.
Gomez-Diaz
,
Z.
Qian
,
A.
Alù
, and
M.
Rinaldi
,
Nat. Commun.
7
(
1
),
11249
(
2016
).
38.
M. B.
Pisani
,
K.
Ren
,
P.
Kao
, and
S.
Tadigadapa
,
J. Microelectromech. Syst.
20
(
1
),
288
296
(
2011
).

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