This work explores the infrared (IR) detection capabilities of 750 nm thick Z-cut lithium niobate (LN) thin film resonator at asymmetric modes of various orders: the first, third, fifth, and seventh order asymmetric (A1, A3, A5, and A7), with resonant frequencies of 2.35, 6.68, 11.09, and 15.49 GHz. Under the infrared radiation of 0.575 mW, the responses about admittance minima and frequency drift corresponding to these modes have been experimentally validated. Notably, the A1 mode exhibits the most significant admittance dip response with 2.62 dB, while the A7 mode demonstrates a maximum frequency drift response of 670 kHz. The optimal parameter for noise equivalent power reaches 15.41 pW/Hz1/2, and the optimal detectivity achieves 7.40 × 106 m Hz1/2/W. These findings indicate the immense potential of LN thin-film resonators for infrared sensing applications.
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6 May 2024
Research Article|
May 07 2024
Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film
Mingye Du
;
Mingye Du
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Project administration, Software, Writing – original draft)
1
School of Information Science and Technology, ShanghaiTech University
, Shanghai 201210, China
2
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
, Shanghai 200050, China
3
University of Chinese Academy of Sciences
, Beijing 100049, China
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Feixuan Huang
;
Feixuan Huang
(Data curation, Formal analysis, Validation, Visualization, Writing – review & editing)
4
School of Microelectronics, Shanghai University
, Shanghai 200444, China
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Jiawei Li
;
Jiawei Li
(Formal analysis, Methodology, Software, Writing – review & editing)
1
School of Information Science and Technology, ShanghaiTech University
, Shanghai 201210, China
2
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
, Shanghai 200050, China
3
University of Chinese Academy of Sciences
, Beijing 100049, China
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Yushuai Liu
;
Yushuai Liu
(Formal analysis, Visualization, Writing – review & editing)
1
School of Information Science and Technology, ShanghaiTech University
, Shanghai 201210, China
2
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
, Shanghai 200050, China
3
University of Chinese Academy of Sciences
, Beijing 100049, China
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Xuankai Xu
;
Xuankai Xu
(Formal analysis, Methodology)
1
School of Information Science and Technology, ShanghaiTech University
, Shanghai 201210, China
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Nan Wang
;
Nan Wang
(Writing – review & editing)
4
School of Microelectronics, Shanghai University
, Shanghai 200444, China
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Tao Wu
Tao Wu
a)
(Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Resources, Supervision, Validation, Visualization, Writing – review & editing)
1
School of Information Science and Technology, ShanghaiTech University
, Shanghai 201210, China
2
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
, Shanghai 200050, China
3
University of Chinese Academy of Sciences
, Beijing 100049, China
5
Shanghai Engineering Research Center of Energy Efficient and Custom AI IC
, Shanghai 201210, China
a)Author to whom correspondence should be addressed: [email protected]
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a)Author to whom correspondence should be addressed: [email protected]
Appl. Phys. Lett. 124, 192202 (2024)
Article history
Received:
January 04 2024
Accepted:
April 23 2024
Citation
Mingye Du, Feixuan Huang, Jiawei Li, Yushuai Liu, Xuankai Xu, Nan Wang, Tao Wu; Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film. Appl. Phys. Lett. 6 May 2024; 124 (19): 192202. https://doi.org/10.1063/5.0196015
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