Here, we report on an acoustoelectric slab waveguide heterostructure for phonon amplification using a thin Al0.58Sc0.42N film grown directly on a 4H-SiC substrate with an ultra-thin In0.53Ga0.47As epitaxial film heterogeneously integrated onto the surface of the Al0.58Sc0.42N. The aluminum scandium nitride film grown directly on silicon carbide enables a thin (∼850 nm thick) piezoelectric film to be deposited on a thermally conductive bulk substrate (370 W/m K for 4H-SiC); the high thermal conductivity of the substrate, large mobility of the semiconductor (∼7000 cm2/V s), and low carrier concentration (∼5 × 1015 cm−3) yield low self-heating. A Sezawa mode with optimal overlap between the peak of its evanescent electric field and the semiconductor charge carriers is supported. The high velocity of the heterostructure materials allows us to operate the Sezawa mode amplifier at 3.05 GHz, demonstrating a gain of 500 dB/cm (40 dB in 800 μm). Additionally, a terminal end-to-end radio frequency gain of 7.7 dB and a nonreciprocal transmission of 52.6 dB are achieved with a dissipated DC power of 2.3 mW. The power added efficiency and acoustic noise figure are also characterized.
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11 March 2024
Research Article|
March 14 2024
S-band acoustoelectric amplifier in an InGaAs-AlScN-SiC architecture Available to Purchase
L. Hackett
;
L. Hackett
(Conceptualization, Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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X. Du
;
X. Du
(Investigation)
2
Department of Electrical and Systems Engineering, University of Pennsylvania
, Philadelphia, Pennsylvania 19104, USA
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M. Miller
;
M. Miller
(Investigation)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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B. Smith
;
B. Smith
(Investigation)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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S. Santillan
;
S. Santillan
(Investigation, Methodology)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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J. Montoya;
J. Montoya
(Investigation, Methodology)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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R. Reyna;
R. Reyna
(Investigation)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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S. Arterburn
;
S. Arterburn
(Investigation)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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S. Weatherred;
S. Weatherred
(Investigation)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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T. A. Friedmann
;
T. A. Friedmann
(Investigation, Supervision)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
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R. H. Olsson, III
;
R. H. Olsson, III
a)
(Conceptualization, Supervision)
2
Department of Electrical and Systems Engineering, University of Pennsylvania
, Philadelphia, Pennsylvania 19104, USA
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M. Eichenfield
M. Eichenfield
a)
(Conceptualization, Funding acquisition, Supervision, Writing – review & editing)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
3
College of Optical Sciences, University of Arizona
, Tucson, Arizona 85719, USA
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L. Hackett
1
M. Miller
1
B. Smith
1
S. Santillan
1
J. Montoya
1
R. Reyna
1
S. Arterburn
1
S. Weatherred
1
T. A. Friedmann
1
R. H. Olsson, III
2,a)
M. Eichenfield
1,3,a)
1
Microsystems Engineering, Science, and Applications, Sandia National Laboratories
, Albuquerque, New Mexico 87123, USA
2
Department of Electrical and Systems Engineering, University of Pennsylvania
, Philadelphia, Pennsylvania 19104, USA
3
College of Optical Sciences, University of Arizona
, Tucson, Arizona 85719, USA
Appl. Phys. Lett. 124, 113503 (2024)
Article history
Received:
September 28 2023
Accepted:
February 29 2024
Citation
L. Hackett, X. Du, M. Miller, B. Smith, S. Santillan, J. Montoya, R. Reyna, S. Arterburn, S. Weatherred, T. A. Friedmann, R. H. Olsson, M. Eichenfield; S-band acoustoelectric amplifier in an InGaAs-AlScN-SiC architecture. Appl. Phys. Lett. 11 March 2024; 124 (11): 113503. https://doi.org/10.1063/5.0178912
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