One of the critical issues in lithography using extreme ultraviolet (EUV) light is tin contamination of the EUV collector mirrors in the tin-based LPP-EUV light source. The contamination can be removed by the reaction of tin atoms with hydrogen radicals producing stannane (SnH4), which is gaseous at the normal temperature. Hydrogen radicals can be produced from hydrogen molecules through photo-dissociation and photo-ionization induced by broadband radiation emitted from the EUV light source. In this work, an efficient production of hydrogen radical using vacuum ultraviolet (VUV) light emitted from laser-produced high-Z plasma is experimentally demonstrated. A two-dimensional radiation hydrodynamic simulation, coupled with photoionization and photo-dissociation cross sections, also shows the efficient hydrogen radical production by increased VUV light emission, as observed in the experiment.
REFERENCES
1.
V.
Bakshi
, EUV Sources for Lithography
(
SPIE Press
,
Bellingham, WA
, 2006
).2.
O. O.
Versolato
, “
Physics of laser-driven tin plasma sources of EUV radiation for nanolithography
,” Plasma Sources Sci. Technol.
28
, 083001
(2019
).3.
S.
Fujioka
,
M.
Shimomura
,
Y.
Shimada
,
S.
Maeda
,
H.
Sakaguchi
,
Y.
Nakai
,
T.
Aota
,
H.
Nishimura
,
N.
Ozaki
,
A.
Sunahara
,
K.
Nishihara
,
N.
Miyanaga
,
Y.
Izawa
, and
K.
Mima
, Appl. Phys. Lett.
92
, 241502
(2008
).4.
K.
Nishihara
,
A.
Sunahara
,
A.
Sasaki
,
M.
Nunami
,
H.
Tanuma
,
S.
Fujioka
,
Y.
Shimada
,
K.
Fujima
,
H.
Furukawa
,
T.
Kato
,
F.
Koike
,
R.
More
,
M.
Murakami
,
T.
Nishikawa
,
V.
Zhakhovskii
,
K.
Gamata
,
A.
Takata
,
H.
Ueda
,
H.
Nishimura
,
Y.
Izawa
,
N.
Miyanaga
, and
K.
Mima
, Phys. Plasmas
15
, 056708
(2008
).5.
Y.
Shimada
,
H.
Nishimura
,
M.
Nakai
,
K.
Hashimoto
,
M.
Yamaura
,
Y.
Tao
,
K.
Shigemori
,
T.
Okuno
,
K.
Nishihara
,
T.
Kawamura
,
A.
Sunahara
,
T.
Nishikawa
,
A.
Sasaki
,
K.
Nagai
,
T.
Norimatsu
,
S.
Fujioka
,
S.
Uchida
,
N.
Miyanaga
,
Y.
Izawa
, and
C.
Yamanaka
, “
Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams
,” Appl. Phys. Lett.
86
, 051501
(2005
).6.
O.
Morris
,
P.
Hayden
,
F.
O'Reilly
,
N.
Murphy
,
P.
Dunne
, and
V.
Bakshi
, Appl. Phys. Lett.
91
, 081506
(2007
).7.
Z.
Bouza
,
J.
Byers
,
J.
Scheers
,
R.
Schupp
,
Y.
Mostafa
,
L.
Behnke
,
Z.
Mazzotta
,
J.
Sheil
,
W.
Ubachs
,
R.
Hoekstra
,
M.
Bayraktar
, and
O. O.
Versolato
, AIP Adv.
11
, 125003
(2021
).8.
S. S.
Harilal
,
B.
O'Shay
,
M. S.
Tillack
, and
M. V.
Mathew
, J. Appl. Phys.
98
, 013306
(2005
).9.
R.
van Es
,
M.
van de Kerkhof
,
A.
Minnaert
,
G.
Fisser
,
J.
de Klerk
,
J.
Smits
,
R.
Moors
,
E.
Verhoeven
,
L.
Levasier
,
R.
Peeters
,
M.
Pieters
, and
H.
Meiling
, Proc. SPIE
10583
, 105830H
(2019
).10.
C.
Eaborn
, J. Organomet. Chem.
35
, C52
(1972
).11.
D.
Qerimi
,
G.
Panici
,
A.
Jain
,
D.
Jacobson
, and
D. N.
Ruzic
, J. Vac. Sci. Technol. B
38
, 052601
(2020
).12.
A. N.
Heays
,
A. D.
Bosman
, and
E. F.
van Dishoeck
, Astron. Astrophys.
602
, A105
(2017
).13.
M. L.
Ginter
and
K.
Yoshino
, Vacuum Ultraviolet Spectroscopy II
(
Elsevier
,
San Diego, CA
, 1999
), Chap. 12, pp. 263
–275
.14.
N.
Tanaka
,
N.
Wada
,
Y.
Kageyama
, and
H.
Nishimura
, High Energy Density Phys.
37
, 100865
(2020
).15.
M.
Masuda
,
N.
Tanaka
,
K.
Hane
,
A.
Sunahara
,
S.
Fujioka
, and
H.
Nishimura
, Appl. Phys. B
119
, 421
–425
(2015
).16.
C.
Liu
,
N.
Tanaka
,
B.
Zhu
,
K.
Nishihara
,
S.
Fujioka
,
K. S.
Kang
,
Y.
Suh
,
J.
Kim
,
K.
Ozawa
, and
M.
Kubo
, Appl. Phys. Express
15
, 036002
(2022
).17.
A.
Sunahara
,
A.
Sasaki
, and
K.
Nishihara
, J. Phys.: Conf. Ser.
112
, 042048
(2008
).18.
A.
Sunahara
,
A.
Hassanein
,
K.
Tomita
,
S.
Namba
, and
T.
Higashiguchi
, Opt. Express
31
, 31780
–31795
(2023
).19.
A.
Kramida
,
Y.
Ralchenko
,
J.
Reader
, and NIST ASD Team
, see https://doi.org/10.18434/T4W30F for “
NIST atomic spectra database (ver. 5.10)
” (2022
).20.
H.
Tanuma
,
H.
Ohashi
,
N.
Yamamoto
,
D.
Kato
,
I.
Murakami
,
S.
Fujioka
,
H.
Nishimura
, and
K.
Nishihara
, “
Charge-exchange EUV spectroscopy in collisions of
(
) with rare gases
,” Phys. Rev. A
84
, 042713
(2011
).21.
S.
Namba
,
S.
Fujioka
,
H.
Sakaguchi
,
H. N. Y.
Yasuda
,
K.
Nagai
,
N.
Miyanaga
,
Y.
Izawa
,
K.
Mima
,
K.
Sato
, and
K.
Takiyama
, J. Appl. Phys.
104
, 013305
(2008
).22.
H.
Sakaguchi
,
S.
Fujioka
,
S.
Namba
,
H.
Tanuma
,
H.
Ohashi
,
S.
Suda
,
M.
Shimomura
,
Y.
Nakai
,
Y.
Kimura
,
Y.
Yasuda
,
H.
Nishimura
,
T.
Norimatsu
,
A.
Sunahara
,
K.
Nishihara
,
N.
Miyanaga
,
Y.
Izawa
, and
K.
Mima
, Appl. Phys. Lett.
92
, 111503
(2008
).23.
24.
H.
Tanuma
,
H.
Ohashi
,
S.
Fujioka
,
H.
Nishimura
,
A.
Sasaki
, and
K.
Nishihara
, J. Phys.: Conf. Ser.
58
, 231
–234
(2007
).25.
S.
Fujioka
,
H.
Nishimura
,
K.
Nishihara
,
A.
Sasaki
,
A.
Sunahara
,
T.
Okuno
,
N.
Ueda
,
T.
Ando
,
Y.
Tao
,
Y.
Shimada
,
K.
Hashimoto
,
M.
Yamaura
,
K.
Shigemori
,
M.
Nakai
,
K.
Nagai
,
T.
Norimatsu
,
T.
Nishikawa
,
N.
Miyanaga
,
Y.
Izawa
, and
K.
Mima
, Phys. Rev. Lett.
95
, 235004
(2005
).26.
Y.
Ueno
,
T.
Ariga
,
T. H. G.
Soumagne
,
S.
Kubodera
,
I.
Pogorelsky
,
I.
Pavlishin
,
D.
Stolyarov
,
M.
Babzien
, and
V. Y. K.
Kusche
, Appl. Phys. Lett.
90
, 191503
(2007
).27.
S.
Suda
,
H.
Ohashi
,
H.
Tanuma
,
S.
Fujioka
,
H.
Nishimura
, and
K.
Nishihara
, “
Vacuum ultraviolet spectra in charge transfer collisions of multiply charged Sn ions
,” J. Phys.: Conf. Ser.
163
, 012053
(2009
).28.
O. V.
Braginsky
,
A. S.
Kovalev
,
D. V.
Lopaev
,
E. M.
Malykhin
,
T. V.
Rakhimova
,
A. T.
Rakhimov
,
A. N.
Vasilieva
,
S. M.
Zyryanov
,
K. N.
Koshelev
,
V. M.
Krivtsun
,
M.
van Kaampen
, and
D.
Glushkov
, J. Appl. Phys.
111
, 093304
(2012
).© 2024 Author(s). Published under an exclusive license by AIP Publishing.
2024
Author(s)
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