TbScO3 is a wide bandgap semiconductor with potential applications in charge trap memory devices and acts as an alternate gate dielectric in fully depleted transistors and also a substrate for epitaxial thin film growth. TbScO3 has an orthorhombic crystal structure, which gives rise to optical anisotropy. Generalized ellipsometric spectra are measured for multiple in-plane rotations of (110) and (001) oriented TbScO3 single crystals over a photon energy range of 0.7–8.5 eV to determine the complex dielectric function (ε = ε1 + 2) spectra for electric fields oscillating along each axis. A direct bandgap is identified at 6.50 eV, and above gap critical point transitions are found at 6.99, 7.14, 7.16, 7.21, and 7.42 eV.

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