Superconducting nanowire single photon detectors (SNSPDs) made with thin NbN films can reach high performances. While sputtering has been the deposition method of choice, here, we show that ammonia-molecular beam epitaxy (NH3-MBE) can produce pertinent epitaxial cubic NbN thin films on silicon substrates using an AlN buffer. Despite granular morphology and a high density of grain boundaries as well as the presence of rotational twins, Tc = 12.7 K for a 5.6 nm thick film and saturation of internal detection efficiency up to 850 nm are achieved. Morphology and stoichiometry as well as strain have a strong impact on the detector properties, highlighting the importance of a precise control of the growth parameters. These results pave the way for high fabrication yield of SNSPDs on large-scale silicon wafers using epitaxial NbN thin films grown by MBE.
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18 December 2023
Research Article|
December 19 2023
NbN thin films grown on silicon by molecular beam epitaxy for superconducting detectors
A. Iovan
;
A. Iovan
(Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Department of Applied Physics, Royal Institute of Technology, Albanova University Centre
, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
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A. Pedeches
;
A. Pedeches
(Investigation, Methodology, Writing – original draft, Writing – review & editing)
2
Université Côte d'Azur, CNRS, CRHEA
, Sophia Antipolis, France
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T. Descamps
;
T. Descamps
(Investigation, Methodology, Writing – original draft, Writing – review & editing)
1
Department of Applied Physics, Royal Institute of Technology, Albanova University Centre
, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
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H. Rotella
;
H. Rotella
(Investigation, Methodology, Writing – original draft, Writing – review & editing)
2
Université Côte d'Azur, CNRS, CRHEA
, Sophia Antipolis, France
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I. Florea
;
I. Florea
(Investigation, Methodology, Writing – original draft, Writing – review & editing)
2
Université Côte d'Azur, CNRS, CRHEA
, Sophia Antipolis, France
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F. Semond;
F. Semond
(Investigation, Methodology, Supervision, Writing – original draft, Writing – review & editing)
2
Université Côte d'Azur, CNRS, CRHEA
, Sophia Antipolis, France
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V. Zwiller
V. Zwiller
a)
(Investigation, Methodology, Supervision, Writing – original draft, Writing – review & editing)
1
Department of Applied Physics, Royal Institute of Technology, Albanova University Centre
, Roslagstullsbacken 21, 106 91 Stockholm, Sweden
3
Single Quantum BV
, Rotterdamseweg 394, 2629HH Delft, The Netherlands
a)Author to whom correspondence should be addressed: [email protected]
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a)Author to whom correspondence should be addressed: [email protected]
Appl. Phys. Lett. 123, 252602 (2023)
Article history
Received:
September 08 2023
Accepted:
November 08 2023
Citation
A. Iovan, A. Pedeches, T. Descamps, H. Rotella, I. Florea, F. Semond, V. Zwiller; NbN thin films grown on silicon by molecular beam epitaxy for superconducting detectors. Appl. Phys. Lett. 18 December 2023; 123 (25): 252602. https://doi.org/10.1063/5.0175699
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