Nanoporous films have potential applications in thermoelectric cooling on a chip, sensors, solar cells, and desalination. For phonon transport, amorphization and other pore-edge defects introduced by the nanofabrication processes can eliminate wave effects by diffusively scattering short-wavelength phonons and thus destroying the phonon phase coherence. As a result, phononic effects can only be observed at 10 K or below, when long-wavelength phonons become dominant for thermal transport. In this work, a 70-nm-thick silicon thin film with approximately 100-nm-diameter nanopores was annealed under a high vacuum, and the change of pore-edge defects was observed with in situ transmission electron microscopy. It was found that the pore-edge defects can be minimized to a sub-1-nm layer by annealing between 773 and 873 K for 30 min, without changing the pore sizes. The largely reduced pore-edge defects are critical to the desired phonon wave effects within a periodic nanoporous structure.
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11 December 2023
Research Article|
December 11 2023
In situ annealing of nanoporous silicon thin films with transmission electron microscopy
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Advances in Thermal Phonon Engineering and Thermal Management
Qin-Yi Li
;
Qin-Yi Li
a)
(Conceptualization, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Supervision, Validation, Writing – original draft)
1
Department of Aeronautics and Astronautics, Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
2
International Institute for Carbon-Neutral Energy Research (WPI-I2CNER), Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
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Fabian Javier Medina;
Fabian Javier Medina
(Data curation, Investigation, Methodology)
3
Department of Aerospace and Mechanical Engineering, University of Arizona
, Tucson, Arizona 85721, USA
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Kosuke Kokura;
Kosuke Kokura
(Data curation, Formal analysis, Investigation, Methodology)
1
Department of Aeronautics and Astronautics, Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
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Zheyu Jin;
Zheyu Jin
(Data curation, Investigation, Methodology)
1
Department of Aeronautics and Astronautics, Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
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Koji Takahashi
;
Koji Takahashi
(Funding acquisition, Writing – review & editing)
1
Department of Aeronautics and Astronautics, Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
2
International Institute for Carbon-Neutral Energy Research (WPI-I2CNER), Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
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Qing Hao
Qing Hao
a)
(Conceptualization, Funding acquisition, Methodology, Project administration, Supervision, Validation, Writing – original draft, Writing – review & editing)
3
Department of Aerospace and Mechanical Engineering, University of Arizona
, Tucson, Arizona 85721, USA
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Qin-Yi Li
1,2,a)
Fabian Javier Medina
3
Kosuke Kokura
1
Zheyu Jin
1
Koji Takahashi
1,2
Qing Hao
3,a)
1
Department of Aeronautics and Astronautics, Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
2
International Institute for Carbon-Neutral Energy Research (WPI-I2CNER), Kyushu University
, 744 Motooka, Fukuoka 819-0395, Japan
3
Department of Aerospace and Mechanical Engineering, University of Arizona
, Tucson, Arizona 85721, USA
Appl. Phys. Lett. 123, 241601 (2023)
Article history
Received:
October 14 2023
Accepted:
November 21 2023
Citation
Qin-Yi Li, Fabian Javier Medina, Kosuke Kokura, Zheyu Jin, Koji Takahashi, Qing Hao; In situ annealing of nanoporous silicon thin films with transmission electron microscopy. Appl. Phys. Lett. 11 December 2023; 123 (24): 241601. https://doi.org/10.1063/5.0181143
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