Placing a sensor close to the target at the nano-level is a central challenge in quantum sensing. We demonstrate magnetic field imaging with a boron vacancy ( ) defects array in hexagonal boron nitride with a few 10 nm thickness. sensor spots with a size of (100 nm)2 are arranged periodically with nanoscale accuracy using a helium ion microscope and attached tightly to a gold wire. The sensor array allows us to visualize the magnetic field induced by the current in the straight micro wire with a high spatial resolution. Each sensor exhibits a practical sensitivity of , suitable for quantum materials research. Our technique of arranging quantum sensors periodically and tightly on measurement targets will maximize their potential.
REFERENCES
1.
J.
Zopes
,
K.
Herb
,
K. S.
Cujia
, and
C. L.
Degen
, “
Three-dimensional nuclear spin positioning using coherent radio-frequency control
,” Phys. Rev. Lett.
121
, 170801
(2018
).2.
K.
Sasaki
,
K. M.
Itoh
, and
E.
Abe
, “
Determination of the position of a single nuclear spin from free nuclear precessions detected by a solid-state quantum sensor
,” Phys. Rev. B
98
, 121405
(2018
).3.
L.
Rondin
,
J. P.
Tetienne
,
S.
Rohart
,
A.
Thiaville
,
T.
Hingant
,
P.
Spinicelli
,
J. F.
Roch
, and
V.
Jacques
, “
Stray-field imaging of magnetic vortices with a single diamond spin
,” Nat. Commun.
4
, 2279
(2013
).4.
P.
Maletinsky
,
S.
Hong
,
M. S.
Grinolds
,
B.
Hausmann
,
M. D.
Lukin
,
R. L.
Walsworth
,
M.
Loncar
, and
A.
Yacoby
, “
A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres
,” Nat. Nanotechnol.
7
, 320
–324
(2012
).5.
T. X.
Zhou
,
R. J.
Stöhr
, and
A.
Yacoby
, “
Scanning diamond NV center probes compatible with conventional AFM technology
,” Appl. Phys. Lett.
111
, 163106
(2017
).6.
A.
Waxman
,
Y.
Schlussel
,
D.
Groswasser
,
V. M.
Acosta
,
L.-S.
Bouchard
,
D.
Budker
, and
R.
Folman
, “
Diamond magnetometry of superconducting thin films
,” Phys. Rev. B
89
, 054509
(2014
).7.
Y.
Schlussel
,
T.
Lenz
,
D.
Rohner
,
Y.
Bar-Haim
,
L.
Bougas
,
D.
Groswasser
,
M.
Kieschnick
,
E.
Rozenberg
,
L.
Thiel
,
A.
Waxman
,
J.
Meijer
,
P.
Maletinsky
,
D.
Budker
, and
R.
Folman
, “
Wide-field imaging of superconductor vortices with electron spins in diamond
,” Phys. Rev. Appl.
10
, 034032
(2018
).8.
M. J.
Burek
,
N. P.
de Leon
,
B. J.
Shields
,
B. J. M.
Hausmann
,
Y.
Chu
,
Q.
Quan
,
A. S.
Zibrov
,
H.
Park
,
M. D.
Lukin
, and
M.
Lončar
, “
Free-standing mechanical and photonic nanostructures in single-crystal diamond
,” Nano Lett.
12
, 6084
–6089
(2012
).9.
C.
Du
,
T.
van der Sar
,
T. X.
Zhou
,
P.
Upadhyaya
,
F.
Casola
,
H.
Zhang
,
M. C.
Onbasli
,
C. A.
Ross
,
R. L.
Walsworth
,
Y.
Tserkovnyak
, and
A.
Yacoby
, “
Control and local measurement of the spin chemical potential in a magnetic insulator
,” Science
357
, 195
–198
(2017
).10.
C.
Foy
,
L.
Zhang
,
M. E.
Trusheim
,
K. R.
Bagnall
,
M.
Walsh
,
E. N.
Wang
, and
D. R.
Englund
, “
Wide-field magnetic field and temperature imaging using nanoscale quantum sensors
,” ACS Appl. Mater. Interfaces
12
, 26525
–26533
(2020
).11.
M.
Tsukamoto
,
S.
Ito
,
K.
Ogawa
,
Y.
Ashida
,
K.
Sasaki
, and
K.
Kobayashi
, “
Accurate magnetic field imaging using nanodiamond quantum sensors enhanced by machine learning
,” Sci. Rep.
12
, 13942
(2022
).12.
K.-M. C.
Fu
,
C.
Santori
,
P. E.
Barclay
, and
R. G.
Beausoleil
, “
Conversion of neutral nitrogen-vacancy centers to negatively charged nitrogen-vacancy centers through selective oxidation
,” Appl. Phys. Lett.
96
, 121907
(2010
).13.
K.
Ohashi
,
T.
Rosskopf
,
H.
Watanabe
,
M.
Loretz
,
Y.
Tao
,
R.
Hauert
,
S.
Tomizawa
,
T.
Ishikawa
,
J.
Ishi-Hayase
,
S.
Shikata
,
C. L.
Degen
, and
K. M.
Itoh
, “
Negatively charged nitrogen-vacancy centers in a 5 nm thin 12C diamond film
,” Nano Lett.
13
, 4733
–4738
(2013
).14.
J.-P.
Tetienne
,
R. W.
de Gille
,
D. A.
Broadway
,
T.
Teraji
,
S. E.
Lillie
,
J. M.
McCoey
,
N.
Dontschuk
,
L. T.
Hall
,
A.
Stacey
,
D. A.
Simpson
, and
L. C. L.
Hollenberg
, “
Spin properties of dense near-surface ensembles of nitrogen-vacancy centers in diamond
,” Phys. Rev. B
97
, 085402
(2018
).15.
S.
Sangtawesin
,
B. L.
Dwyer
,
S.
Srinivasan
,
J. J.
Allred
,
L. V.
Rodgers
,
K. D.
Greve
,
A.
Stacey
,
N.
Dontschuk
,
K. M.
O'Donnell
,
D.
Hu
,
D. A.
Evans
,
C.
Jaye
,
D. A.
Fischer
,
M. L.
Markham
,
D. J.
Twitchen
,
H.
Park
,
M. D.
Lukin
, and
N. P.
de Leon
, “
Origins of diamond surface noise probed by correlating single-spin measurements with surface spectroscopy
,” Phys. Rev. X
9
, 031052
(2019
).16.
A. J.
Healey
,
S. C.
Scholten
,
A.
Nadarajah
,
P.
Singh
,
N.
Dontschuk
,
L. C. L.
Hollenberg
,
D. A.
Simpson
, and
J. P.
Tetienne
, “
On the creation of near-surface nitrogen-vacancy centre ensembles by implantation of type Ib diamond
,” arXiv:2210.16469 (2022
).17.
A. J.
Häußler
,
P.
Heller
,
L. P.
McGuinness
,
B.
Naydenov
, and
F.
Jelezko
, “
Optical depth localization of nitrogen-vacancy centers in diamond with nanometer accuracy
,” Opt. Express
22
, 29986
(2014
).18.
M. S.
Grinolds
,
M.
Warner
,
K. D.
Greve
,
Y.
Dovzhenko
,
L.
Thiel
,
R. L.
Walsworth
,
S.
Hong
,
P.
Maletinsky
, and
A.
Yacoby
, “
Subnanometre resolution in three-dimensional magnetic resonance imaging of individual dark spins
,” Nat. Nanotechnol.
9
, 279
–284
(2014
).19.
L. M.
Pham
,
S. J.
DeVience
,
F.
Casola
,
I.
Lovchinsky
,
A. O.
Sushkov
,
E.
Bersin
,
J.
Lee
,
E.
Urbach
,
P.
Cappellaro
,
H.
Park
,
A.
Yacoby
,
M.
Lukin
, and
R. L.
Walsworth
, “
NMR technique for determining the depth of shallow nitrogen-vacancy centers in diamond
,” Phys. Rev. B
93
, 045425
(2016
).20.
A.
Gottscholl
,
M.
Kianinia
,
V.
Soltamov
,
S.
Orlinskii
,
G.
Mamin
,
C.
Bradac
,
C.
Kasper
,
K.
Krambrock
,
A.
Sperlich
,
M.
Toth
,
I.
Aharonovich
, and
V.
Dyakonov
, “
Initialization and read-out of intrinsic spin defects in a van der Waals crystal at room temperature
,” Nat. Mater.
19
, 540
–545
(2020
).21.
A.
Gottscholl
,
M.
Diez
,
V.
Soltamov
,
C.
Kasper
,
D.
Krauße
,
A.
Sperlich
,
M.
Kianinia
,
C.
Bradac
,
I.
Aharonovich
, and
V.
Dyakonov
, “
Spin defects in hBN as promising temperature, pressure and magnetic field quantum sensors
,” Nat. Commun.
12
, 4480
(2021
).22.
M.
Huang
,
J.
Zhou
,
D.
Chen
,
H.
Lu
,
N. J.
McLaughlin
,
S.
Li
,
M.
Alghamdi
,
D.
Djugba
,
J.
Shi
,
H.
Wang
, and
C. R.
Du
, “
Wide field imaging of van der Waals ferromagnet Fe3GeTe2 by spin defects in hexagonal boron nitride
,” Nat. Commun.
13
, 5369
(2022
).23.
A. J.
Healey
,
S. C.
Scholten
,
T.
Yang
,
J. A.
Scott
,
G. J.
Abrahams
,
I. O.
Robertson
,
X. F.
Hou
,
Y. F.
Guo
,
S.
Rahman
,
Y.
Lu
,
M.
Kianinia
,
I.
Aharonovich
, and
J.-P.
Tetienne
, “
Quantum microscopy with van der Waals heterostructures
,” Nat. Phys.
19
, 87
(2023
).24.
P.
Kumar
,
F.
Fabre
,
A.
Durand
,
T.
Clua-Provost
,
J.
Li
,
J. H.
Edgar
,
N.
Rougemaille
,
J.
Coraux
,
X.
Marie
,
P.
Renucci
,
C.
Robert
,
I.
Robert-Philip
,
B.
Gil
,
G.
Cassabois
,
A.
Finco
, and
V.
Jacques
, “
Magnetic imaging with spin defects in hexagonal boron nitride
,” Phys. Rev. Applied
18
, L061002
(2022
).25.
J.
Martin
,
R.
Wannemacher
,
J.
Teichert
,
L.
Bischoff
, and
B.
Köhler
, “
Generation and detection of fluorescent color centers in diamond with submicron resolution
,” Appl. Phys. Lett.
75
, 3096
–3098
(1999
).26.
T.
Herzig
,
T.
Lühmann
,
P.
Räcke
,
C.
Scheuner
,
S.
Pezzagna
, and
J.
Meijer
, “Color
center formation by deterministic single ion implantation
,” in Diamond for Quantum Applications Part 2
, Semiconductors and Semimetals (
Elsevier
, 2021
), Vol.
104
, Chap. 1, pp. 1
–30
.27.
J.
Klein
,
M.
Lorke
,
M.
Florian
,
F.
Sigger
,
L.
Sigl
,
S.
Rey
,
J.
Wierzbowski
,
J.
Cerne
,
K.
Müller
,
E.
Mitterreiter
,
P.
Zimmermann
,
T.
Taniguchi
,
K.
Watanabe
,
U.
Wurstbauer
,
M.
Kaniber
,
M.
Knap
,
R.
Schmidt
,
J. J.
Finley
, and
A. W.
Holleitner
, “
Site-selectively generated photon emitters in monolayer MoS2 via local helium ion irradiation
,” Nat. Commun.
10
, 2755
(2019
).28.
E.
Mitterreiter
,
B.
Schuler
,
K. A.
Cochrane
,
U.
Wurstbauer
,
A.
Weber-Bargioni
,
C.
Kastl
, and
A. W.
Holleitner
, “
Atomistic positioning of defects in helium ion treated single-layer MoS2
,” Nano Lett.
20
, 4437
–4444
(2020
).29.
J.
Klein
,
L.
Sigl
,
S.
Gyger
,
K.
Barthelmi
,
M.
Florian
,
S.
Rey
,
T.
Taniguchi
,
K.
Watanabe
,
F.
Jahnke
,
C.
Kastl
,
V.
Zwiller
,
K. D.
Jöns
,
K.
Müller
,
U.
Wurstbauer
,
J. J.
Finley
, and
A. W.
Holleitner
, “
Engineering the luminescence and generation of individual defect emitters in atomically thin MoS2
,” ACS Photonics
8
, 669
–677
(2021
).30.
Q.
Liang
,
Q.
Zhang
,
X.
Zhao
,
M.
Liu
, and
A. T. S.
Wee
, “
Defect engineering of two-dimensional transition-metal dichalcogenides: Applications, challenges, and opportunities
,” ACS Nano
15
, 2165
–2181
(2021
).31.
F. I.
Allen
, “
A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope
,” Beilstein J. Nanotechnol.
12
, 633
–664
(2021
).32.
C. A.
McLellan
,
B. A.
Myers
,
S.
Kraemer
,
K.
Ohno
,
D. D.
Awschalom
, and
A. C. B.
Jayich
, “
Patterned formation of highly coherent nitrogen-vacancy centers using a focused electron irradiation technique
,” Nano Lett.
16
, 2450
–2454
(2016
).33.
C.
Fournier
,
A.
Plaud
,
S.
Roux
,
A.
Pierret
,
M.
Rosticher
,
K.
Watanabe
,
T.
Taniguchi
,
S.
Buil
,
X.
Quélin
,
J.
Barjon
,
J.-P.
Hermier
, and
A.
Delteil
, “
Position-controlled quantum emitters with reproducible emission wavelength in hexagonal boron nitride
,” Nat. Commun.
12
, 3779
(2021
).34.
X.-J.
Wang
,
H.-H.
Fang
,
F.-W.
Sun
, and
H.-B.
Sun
, “
Laser writing of color centers
,” Laser Photonics Rev.
16
, 2100029
(2022
).35.
D. M.
Toyli
,
C. D.
Weis
,
G. D.
Fuchs
,
T.
Schenkel
, and
D. D.
Awschalom
, “
Chip-scale nanofabrication of single spins and spin arrays in diamond
,” Nano Lett.
10
, 3168
–3172
(2010
).36.
X.
Yang
,
Y.-K.
Tzeng
,
Z.
Zhu
,
Z.
Huang
,
X.
Chen
,
Y.
Liu
,
H.-C.
Chang
,
L.
Huang
,
W.-D.
Li
, and
P.
Xi
, “
Sub-diffraction imaging of nitrogen-vacancy centers in diamond by stimulated emission depletion and structured illumination
,” RSC Adv.
4
, 11305
(2014
).37.
X.-D.
Zeng
,
Y.-Z.
Yang
,
N.-J.
Guo
,
Z.-P.
Li
,
Z.-A.
Wang
,
L.-K.
Xie
,
S.
Yu
,
Y.
Meng
,
Q.
Li
,
J.-S.
Xu
,
W.
Liu
,
Y.-T.
Wang
,
J.-S.
Tang
,
C.-F.
Li
, and
G.-C.
Guo
, “
Reflective dielectric cavity enhanced emission from hexagonal boron nitride spin defect arrays
,” arXiv:2209.00256 (2022
).38.
T.
Iwasaki
,
K.
Endo
,
E.
Watanabe
,
D.
Tsuya
,
Y.
Morita
,
S.
Nakaharai
,
Y.
Noguchi
,
Y.
Wakayama
,
K.
Watanabe
,
T.
Taniguchi
, and
S.
Moriyama
, “
Bubble-free transfer technique for high-quality graphene/hexagonal boron nitride van der Waals heterostructures
,” ACS Appl. Mater. Interfaces
12
, 8533
–8538
(2020
).39.
S.
Nakaharai
,
T.
Iwasaki
,
Y.
Morita
,
S.
Moriyama
, and
S.
Ogawa
, “
Electron transport tuning of graphene by helium ion irradiation
,” Nano Express
3
, 024002
(2022
).40.
N.-J.
Guo
,
W.
Liu
,
Z.-P.
Li
,
Y.-Z.
Yang
,
S.
Yu
,
Y.
Meng
,
Z.-A.
Wang
,
X.-D.
Zeng
,
F.-F.
Yan
,
Q.
Li
,
J.-F.
Wang
,
J.-S.
Xu
,
Y.-T.
Wang
,
J.-S.
Tang
,
C.-F.
Li
, and
G.-C.
Guo
, “
Generation of spin defects by ion implantation in hexagonal boron nitride
,” ACS Omega
7
, 1733
–1739
(2022
).41.
D.
Misonou
,
K.
Sasaki
,
S.
Ishizu
,
Y.
Monnai
,
K. M.
Itoh
, and
E.
Abe
, “
Construction and operation of a tabletop system for nanoscale magnetometry with single nitrogen-vacancy centers in diamond
,” AIP Advances
10
, 025206
(2020
).42.
X.
Gao
,
B.
Jiang
,
A. E. L.
Allcca
,
K.
Shen
,
M. A.
Sadi
,
A. B.
Solanki
,
P.
Ju
,
Z.
Xu
,
P.
Upadhyaya
,
Y. P.
Chen
,
S. A.
Bhave
, and
T.
Li
, “
High-contrast plasmonic-enhanced shallow spin defects in hexagonal boron nitride for quantum sensing
,” Nano Lett.
21
, 7708
–7714
(2021
).43.
E.
Fort
and
S.
Grésillon
, “
Surface enhanced fluorescence
,” J. Phys. D: Appl. Phys.
41
, 013001
(2008
).44.
S.
Sengottuvel
,
M.
Mrózek
,
M.
Sawczak
,
M. J.
Głowacki
,
M.
Ficek
,
W.
Gawlik
, and
A. M.
Wojciechowski
, “
Wide-field magnetometry using nitrogen-vacancy color centers with randomly oriented micro-diamonds
,” Sci. Rep.
12
, 17997
(2022
).45.
W.
Liu
,
Z.-P.
Li
,
Y.-Z.
Yang
,
S.
Yu
,
Y.
Meng
,
Z.-A.
Wang
,
Z.-C.
Li
,
N.-J.
Guo
,
F.-F.
Yan
,
Q.
Li
,
J.-F.
Wang
,
J.-S.
Xu
,
Y.-T.
Wang
,
J.-S.
Tang
,
C.-F.
Li
, and
G.-C.
Guo
, “
Temperature-dependent energy-level shifts of spin defects in hexagonal boron nitride
,” ACS Photonics
8
, 1889
–1895
(2021
).46.
G.
Mariani
,
S.
Nomoto
,
S.
Kashiwaya
, and
S.
Nomura
, “
System for the remote control and imaging of MW fields for spin manipulation in NV centers in diamond
,” Sci. Rep.
10
, 4813
(2020
).47.
M. J. H.
Ku
,
T. X.
Zhou
,
Q.
Li
,
Y. J.
Shin
,
J. K.
Shi
,
C.
Burch
,
L. E.
Anderson
,
A. T.
Pierce
,
Y.
Xie
,
A.
Hamo
,
U.
Vool
,
H.
Zhang
,
F.
Casola
,
T.
Taniguchi
,
K.
Watanabe
,
M. M.
Fogler
,
P.
Kim
,
A.
Yacoby
, and
R. L.
Walsworth
, “
Imaging viscous flow of the Dirac fluid in graphene
,” Nature
583
, 537
–541
(2020
).48.
A.
Jenkins
,
S.
Baumann
,
H.
Zhou
,
S. A.
Meynell
,
Y.
Daipeng
,
K.
Watanabe
,
T.
Taniguchi
,
A.
Lucas
,
A. F.
Young
, and
A. C. B.
Jayich
, “
Imaging the breakdown of ohmic transport in graphene
,” Phys. Rev. Lett.
129
, 087701
(2022
).49.
M.
Palm
,
W.
Huxter
,
P.
Welter
,
S.
Ernst
,
P.
Scheidegger
,
S.
Diesch
,
K.
Chang
,
P.
Rickhaus
,
T.
Taniguchi
,
K.
Watanabe
,
K.
Ensslin
, and
C.
Degen
, “
Imaging of submicroampere currents in bilayer graphene using a scanning diamond magnetometer
,” Phys. Rev. Appl.
17
, 054008
(2022
).50.
M. J.
Rust
,
M.
Bates
, and
X.
Zhuang
, “
Sub-diffraction-limit imaging by stochastic optical reconstruction microscopy (STORM)
,” Nat. Methods
3
, 793
–796
(2006
).51.
S. W.
Hell
and
M.
Kroug
, “
Ground-state-depletion fluorscence microscopy: A concept for breaking the diffraction resolution limit
,” Appl. Phys. B: Lasers Opt.
60
, 495
–497
(1995
).© 2023 Author(s). Published under an exclusive license by AIP Publishing.
2023
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