Single-flux-quantum signal processors monolithically integrated with a superconducting nanostrip single-photon detector array

We developed a monolithic integration process for a superconducting nanostrip single-photon detector (SNSPD) and a cryogenic signal processor based on a single-flux-quantum (SFQ) circuit. Sixteen-pixel SNSPDs consisting of a 10-nm-thick and 100-nm-wide NbTiN nanowire were fabricated on a 3-in. Si wafer with an SFQ merger fabricated by the National Institute of Advanced Industrial Science and Technology Nb 2.5 kA/cm² standard process 2. Subsequently, we illuminated the photons on the 16-pixel SNSPD array through an optical fiber and obtained a similar bias-current dependence of the detection efficiency with a single-pixel SNSPD without the SFQ merger. This indicates that the SFQ merger works correctly, and that the power dissipation of the SFQ circuit, which is estimated to be 200 μW, does not deteriorate the photon detection of SNSPD fabricated on the same chip with a size of 5 × 5 mm². Furthermore, we measured timing jitter using a pulsed laser as the photon source. Owing to the careful tuning of the wiring length between each pixel of the 16-pixel SNSPD and each input port of the SFQ merger, the obtained timing jitter was 41.4 ps, which is approximately equal to or less than that of the single-pixel SNSPD.