We developed a monolithic integration process for a superconducting nanostrip single-photon detector (SNSPD) and a cryogenic signal processor based on a single-flux-quantum (SFQ) circuit. Sixteen-pixel SNSPDs consisting of a 10-nm-thick and 100-nm-wide NbTiN nanowire were fabricated on a 3-in. Si wafer with an SFQ merger fabricated by the National Institute of Advanced Industrial Science and Technology Nb 2.5 kA/cm2 standard process 2. Subsequently, we illuminated the photons on the 16-pixel SNSPD array through an optical fiber and obtained a similar bias-current dependence of the detection efficiency with a single-pixel SNSPD without the SFQ merger. This indicates that the SFQ merger works correctly, and that the power dissipation of the SFQ circuit, which is estimated to be 200 μW, does not deteriorate the photon detection of SNSPD fabricated on the same chip with a size of 5 × 5 mm2. Furthermore, we measured timing jitter using a pulsed laser as the photon source. Owing to the careful tuning of the wiring length between each pixel of the 16-pixel SNSPD and each input port of the SFQ merger, the obtained timing jitter was 41.4 ps, which is approximately equal to or less than that of the single-pixel SNSPD.
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1 May 2023
Research Article|
May 01 2023
Single-flux-quantum signal processors monolithically integrated with a superconducting nanostrip single-photon detector array
Special Collection:
Advances in Superconducting Logic
Shigeyuki Miyajima
;
Shigeyuki Miyajima
a)
(Conceptualization, Data curation, Investigation, Methodology, Writing – original draft)
1
National Institute of Information and Communications Technology
, 588-2 Iwaoka, Nishi-ku, Kobe, Hyogo 651-2492, Japan
a)Author to whom correspondence should be addressed: [email protected]
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Masahiro Yabuno
;
Masahiro Yabuno
(Conceptualization, Data curation, Investigation, Methodology, Writing – review & editing)
1
National Institute of Information and Communications Technology
, 588-2 Iwaoka, Nishi-ku, Kobe, Hyogo 651-2492, Japan
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Shigehito Miki
;
Shigehito Miki
(Conceptualization, Investigation, Methodology, Supervision, Writing – review & editing)
1
National Institute of Information and Communications Technology
, 588-2 Iwaoka, Nishi-ku, Kobe, Hyogo 651-2492, Japan
2
Kobe University
, 1-1 Rokkodai-cho, Nada, Kobe 657-0013, Japan
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Shuichi Nagasawa
;
Shuichi Nagasawa
(Funding acquisition, Investigation, Methodology, Writing – review & editing)
3
National Institute of Advanced Industrial Science and Technology
, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Mutsuo Hidaka
;
Mutsuo Hidaka
(Conceptualization, Funding acquisition, Investigation, Methodology, Writing – review & editing)
3
National Institute of Advanced Industrial Science and Technology
, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Hirotaka Terai
Hirotaka Terai
(Conceptualization, Funding acquisition, Investigation, Methodology, Supervision, Writing – review & editing)
1
National Institute of Information and Communications Technology
, 588-2 Iwaoka, Nishi-ku, Kobe, Hyogo 651-2492, Japan
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a)Author to whom correspondence should be addressed: [email protected]
Note: This paper is part of the APL Special Collection on Advances in Superconducting Logic.
Appl. Phys. Lett. 122, 182602 (2023)
Article history
Received:
February 01 2023
Accepted:
April 15 2023
Citation
Shigeyuki Miyajima, Masahiro Yabuno, Shigehito Miki, Shuichi Nagasawa, Mutsuo Hidaka, Hirotaka Terai; Single-flux-quantum signal processors monolithically integrated with a superconducting nanostrip single-photon detector array. Appl. Phys. Lett. 1 May 2023; 122 (18): 182602. https://doi.org/10.1063/5.0144808
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