Interface traps generally are not considered to be likely sources of low-frequency (LF) noise and/or random telegraph noise (RTN) in metal–oxide–semiconductor (MOS) devices because the longer carrier exchange times of border traps are more consistent with experimental observations. In contrast, correlated mobility fluctuations due to remote Coulomb scattering from charged border traps cannot explain the unexpectedly large LF noise and/or RTN observed in some MOS devices. In this Letter it is proposed that equilibrium fluctuations in interface-trap concentrations caused by hydrogen-induced activation and passivation reactions can lead to enhanced LF noise and RTN. This mechanism adds to other noise sources, including border traps, random dopants, and bulk-Si defect clusters.
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24 April 2023
Research Article|
April 24 2023
Interface traps, correlated mobility fluctuations, and low-frequency noise in metal–oxide–semiconductor transistors
Special Collection:
Electronic Noise: From Advanced Materials to Quantum Technologies
D. M. Fleetwood
D. M. Fleetwood
a)
(Writing – original draft, Writing – review & editing)
Department of Electrical and Computer Engineering, Vanderbilt University
, Nashville, Tennessee 37235, USA
a)Author to whom correspondence should be addressed: dan.fleetwood@vanderbilt.edu
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a)Author to whom correspondence should be addressed: dan.fleetwood@vanderbilt.edu
Note: This paper is part of the APL Special Collection on Electronic Noise: From Advanced Materials to Quantum Technologies.
Appl. Phys. Lett. 122, 173504 (2023)
Article history
Received:
February 14 2023
Accepted:
April 08 2023
Citation
D. M. Fleetwood; Interface traps, correlated mobility fluctuations, and low-frequency noise in metal–oxide–semiconductor transistors. Appl. Phys. Lett. 24 April 2023; 122 (17): 173504. https://doi.org/10.1063/5.0146549
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