Test masses of future laser interferometric gravitational-wave detectors will be made of high-purity silicon and cooled, in particular, to 123 K in the LIGO Voyager project. Electrostatic actuators are supposed to be used to tune the test mass position. Capacitive coupling of the actuator electrodes with the silicon test mass results in the mechanical loss caused by electric currents flowing in silicon having a finite resistivity. This loss is a cause of additional thermal noise. In this study, we present the results of temperature dependence of the electric field induced loss in the bending vibration mode of commercial disk-shaped undoped silicon wafers in the temperature range of 100–295 K.
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