The microwave annealing of semiconductor devices has not been extensively researched and is rarely utilized in industry, yet it has the potential to significantly reduce the time and cost associated with large-volume semiconductor processing, such as the various heating and annealing processes required in the manufacture of photovoltaic modules. In this paper, we describe microwave annealing of silicon solar cells, the effective passivation of light-induced defects, and a reduction in light-induced degradation. We find that silicon solar cells are heated rapidly in a microwave field and that effective B–O defect passivation can be achieved by microwave processing in less than 2 s. Microwave annealing yields similar results as compared to rapid thermal annealing.
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3 April 2023
Research Article|
April 03 2023
Microwave annealing of silicon solar cells
Binesh Puthen Veettil
;
Binesh Puthen Veettil
a)
(Conceptualization, Data curation, Investigation, Methodology, Writing – original draft)
1
School of Engineering, Macquarie University, Macquarie
Park NSW 2109, Australia
a)Author to whom correspondence should be addressed: [email protected]
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Yuchao Zhang
;
Yuchao Zhang
(Data curation, Investigation)
2
School of Photovoltaic and Renewable Energy Engineering, University of New South Wales
, Sydney NSW 2207, Australia
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David Payne
;
David Payne
(Funding acquisition, Methodology, Writing – review & editing)
1
School of Engineering, Macquarie University, Macquarie
Park NSW 2109, Australia
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Mattias Juhl;
Mattias Juhl
(Formal analysis, Writing – review & editing)
1
School of Engineering, Macquarie University, Macquarie
Park NSW 2109, Australia
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Shujuan Huang
;
Shujuan Huang
(Funding acquisition, Resources, Writing – review & editing)
1
School of Engineering, Macquarie University, Macquarie
Park NSW 2109, Australia
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Brett Hallam
;
Brett Hallam
(Data curation, Formal analysis, Funding acquisition, Supervision, Writing – review & editing)
2
School of Photovoltaic and Renewable Energy Engineering, University of New South Wales
, Sydney NSW 2207, Australia
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Darren Bagnall
Darren Bagnall
(Formal analysis, Funding acquisition, Methodology, Writing – review & editing)
1
School of Engineering, Macquarie University, Macquarie
Park NSW 2109, Australia
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Binesh Puthen Veettil
1,a)
Yuchao Zhang
2
David Payne
1
Mattias Juhl
1
Shujuan Huang
1
Brett Hallam
2
Darren Bagnall
1
1
School of Engineering, Macquarie University, Macquarie
Park NSW 2109, Australia
2
School of Photovoltaic and Renewable Energy Engineering, University of New South Wales
, Sydney NSW 2207, Australia
a)Author to whom correspondence should be addressed: [email protected]
Appl. Phys. Lett. 122, 142101 (2023)
Article history
Received:
September 25 2022
Accepted:
March 21 2023
Citation
Binesh Puthen Veettil, Yuchao Zhang, David Payne, Mattias Juhl, Shujuan Huang, Brett Hallam, Darren Bagnall; Microwave annealing of silicon solar cells. Appl. Phys. Lett. 3 April 2023; 122 (14): 142101. https://doi.org/10.1063/5.0127896
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