High peak power, room-temperature operation in the long wave infrared spectral region is reported for double-channel, ridge waveguide quantum cascade lasers (QCLs) monolithically integrated onto a silicon substrate. The 55-stage laser structure with an AlInAs/InGaAs core and InP cladding was grown by molecular beam epitaxy directly onto an 8-in. diameter germanium-coated silicon substrate template via a III–V alloy metamorphic buffer. Atomic force microscope imaging demonstrated a good quality surface for the full QCL structure grown on silicon, with improved roughness over wider areas compared to the previous work. Fabricated 3 mm × 26 μm lasers operate at room temperature, deliver more than 3 W of peak (6 mW of average) optical power, and show approximately 3% wall plug efficiency and 4.3 kA/cm2 threshold current density with emission wavelength centered at 11.5 μm. The lasers had a high yield with only around 15% max power deviation and no signs of performance degradation were observed over a 10 h burn in period at maximum power. Singled-lobed high quality output beam with M2 = 1.36 was measured for 3 mm × 22 μm devices, demonstrating that it is possible to produce high-brightness quantum cascade lasers on silicon with standard ridge waveguide processing paving the way for low-cost production of integrated mid-infrared platforms.
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3 April 2023
Research Article|
April 06 2023
High peak power quantum cascade lasers monolithically integrated onto silicon with high yield and good near-term reliability Available to Purchase
Enrique Cristobal
;
Enrique Cristobal
(Conceptualization, Formal analysis, Investigation, Project administration, Writing – original draft)
1
IRGLARE, LLC
, 3259 Progress Drive, Orlando, Florida 32826, USA
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Matthew Fetters;
Matthew Fetters
(Conceptualization, Investigation)
2
IQE, Inc.
, 119 Technology Drive, Bethlehem, Pennsylvania 18015, USA
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Amy W. K. Liu
;
Amy W. K. Liu
(Conceptualization, Investigation)
2
IQE, Inc.
, 119 Technology Drive, Bethlehem, Pennsylvania 18015, USA
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Joel M. Fastenau;
Joel M. Fastenau
(Conceptualization, Investigation, Writing – review & editing)
2
IQE, Inc.
, 119 Technology Drive, Bethlehem, Pennsylvania 18015, USA
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Ahmad Azim;
Ahmad Azim
(Investigation)
1
IRGLARE, LLC
, 3259 Progress Drive, Orlando, Florida 32826, USA
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Luke Milbocker
;
Luke Milbocker
(Investigation)
3
NanoScience Technology Center, University of Central Florida
, 12424 Research Parkway, Orlando, Florida 32826, USA
4
Department of Electrical & Computer Engineering, University of Central Florida
, 4328 Scorpius Street, Orlando, Florida 32816, USA
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Arkadiy Lyakh
Arkadiy Lyakh
a)
(Conceptualization, Funding acquisition, Investigation, Project administration, Writing – review & editing)
3
NanoScience Technology Center, University of Central Florida
, 12424 Research Parkway, Orlando, Florida 32826, USA
4
Department of Electrical & Computer Engineering, University of Central Florida
, 4328 Scorpius Street, Orlando, Florida 32816, USA
5
College of Optics and Photonics, University of Central Florida
, 4304 Scorpius Street, Orlando, Florida 32816, USA
6
Department of Physics, University of Central Florida
, 4111 Libra Drive, Orlando, Florida 32816, USA
a)Author to whom correspondence should be addressed: [email protected]
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Enrique Cristobal
1
Matthew Fetters
2
Amy W. K. Liu
2
Joel M. Fastenau
2
Ahmad Azim
1
Luke Milbocker
3,4
Arkadiy Lyakh
3,4,5,6,a)
1
IRGLARE, LLC
, 3259 Progress Drive, Orlando, Florida 32826, USA
2
IQE, Inc.
, 119 Technology Drive, Bethlehem, Pennsylvania 18015, USA
3
NanoScience Technology Center, University of Central Florida
, 12424 Research Parkway, Orlando, Florida 32826, USA
4
Department of Electrical & Computer Engineering, University of Central Florida
, 4328 Scorpius Street, Orlando, Florida 32816, USA
5
College of Optics and Photonics, University of Central Florida
, 4304 Scorpius Street, Orlando, Florida 32816, USA
6
Department of Physics, University of Central Florida
, 4111 Libra Drive, Orlando, Florida 32816, USA
a)Author to whom correspondence should be addressed: [email protected]
Appl. Phys. Lett. 122, 141108 (2023)
Article history
Received:
March 03 2023
Accepted:
March 28 2023
Citation
Enrique Cristobal, Matthew Fetters, Amy W. K. Liu, Joel M. Fastenau, Ahmad Azim, Luke Milbocker, Arkadiy Lyakh; High peak power quantum cascade lasers monolithically integrated onto silicon with high yield and good near-term reliability. Appl. Phys. Lett. 3 April 2023; 122 (14): 141108. https://doi.org/10.1063/5.0149072
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