Mechanical scanning probe lithography of perovskites for fabrication of high-Q planar polaritonic cavities

Exciton–polaritons are unique quasiparticles with hybrid properties of an exciton and a photon, opening ways to realize ultrafast strongly nonlinear systems and inversion-free lasers based on Bose–Einstein polariton condensation. However, the real-world applications of polariton systems are still limited due to the temperature operation and costly fabrication techniques for both exciton materials and photon cavities. 2D perovskites represent one of the most prospective platforms for the realization of strong light-matter coupling since they support room-temperature exciton states with large oscillator strength and can simultaneously be used for fabrication of planar photon cavities with strong field localization due to the high refractive index of the material. In this work, we demonstrate the affordable mechanical scanning probe lithography method for research purposes and for the realization of room-temperature exciton–polariton systems based on 2D perovskite (PEA)2PbI4 with the Rabi splitting exceeding 200 meV. By the precise control of lithography parameters, we broadly adjust the exciton–polariton dispersion and, in particular, vary the radiative coupling of polaritonic modes to the free space. Our findings represent a versatile approach to fabrication of planar high-quality perovskite-based photonic cavities supporting the strong light-matter coupling regime for the development of on-chip all-optical active and nonlinear polaritonic devices.