Piezoresistive effect is crucial in a pressure sensor design. Therefore, a theoretical model that can accurately predict the gauge factor (GF) of graphene pressure sensors should be designed. In this study, the function relationship between the relative change in resistance and the strain was established using the Fermi velocity as the intermediate variable. A theoretical model that can be used for various substrates was established after considering the anisotropic properties of graphene and the principle of action of pressure sensors. Tests on the graphene pressure sensor device fabricated using semiconductor technology revealed that the GF [GF = (ΔR/R)/ε] of the device was 1.14, which was within the theoretical prediction range (1.06–2.08). Furthermore, the reported Poisson's ratio values of various substrates were substituted into the calculation formula of the GF. The results revealed that the predicted value was highly consistent with the experimental test results. This result indicated that the theoretical model suitable for predicting the GF of graphene pressure sensors with various substrates is universal. This theory can provide theoretical guidance for the development of high-sensitivity graphene pressure sensors.
Skip Nav Destination
Article navigation
12 December 2022
Research Article|
December 12 2022
Theoretical modeling and experimental verification of graphene piezoresistive properties under uniaxial strain in nanoelectromechanical pressure sensors
Special Collection:
Phononics of Graphene, Layered Materials, and Heterostructures
Junqiang Wang
;
Junqiang Wang
a)
(Conceptualization, Methodology, Writing – review & editing)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Shuai Lei
;
Shuai Lei
(Formal analysis, Writing – original draft)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Ningning Su;
Ningning Su
(Writing – review & editing)
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
3
School of Semiconductors and Physics, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Wen Hou;
Wen Hou
(Software)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Mengwei Li
;
Mengwei Li
a)
(Funding acquisition, Supervision)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Shiyu Zheng;
Shiyu Zheng
(Validation)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Haikun Zhang;
Haikun Zhang
(Data curation)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Xiaolin Lv
Xiaolin Lv
(Investigation)
1
State Key Laboratory of Dynamic Measurement Technology, North University of China
, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China
, Taiyuan 030051, China
Search for other works by this author on:
Note: This paper is part of the APL Special Collection on Phononics of Graphene, Layered Materials, and Heterostructures.
Appl. Phys. Lett. 121, 243502 (2022)
Article history
Received:
September 07 2022
Accepted:
December 01 2022
Citation
Junqiang Wang, Shuai Lei, Ningning Su, Wen Hou, Mengwei Li, Shiyu Zheng, Haikun Zhang, Xiaolin Lv; Theoretical modeling and experimental verification of graphene piezoresistive properties under uniaxial strain in nanoelectromechanical pressure sensors. Appl. Phys. Lett. 12 December 2022; 121 (24): 243502. https://doi.org/10.1063/5.0124635
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00