Resonant modal interaction is a nonlinear dynamic phenomenon observed in structures excited at large vibration amplitudes. In the present work, we report the experimental evidence of a 1:1 internal resonance in a symmetric resonant micromirror. The experiments are complemented with a reduced model obtained from the 3D finite element discretization of the device by parametrizing the system motion along a low dimensional invariant set of the phase space. The presence of coupling monomials in the governing equations makes the resulting dynamics non-linearizable. Both model and experimental data show the existence of a complex pattern of multiple stable solutions for a given value of the excitation frequency.
One-to-one internal resonance in a symmetric MEMS micromirror
Andrea Opreni, Matteo Furlan, Andreea Bursuc, Nicoló Boni, Gianluca Mendicino, Roberto Carminati, Attilio Frangi; One-to-one internal resonance in a symmetric MEMS micromirror. Appl. Phys. Lett. 24 October 2022; 121 (17): 173501. https://doi.org/10.1063/5.0120724
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