Vibration energy harvesters that use resonance phenomena exhibit a high output power density for constant frequency vibrations, but they suffer from a significant drop in performance for non-steady-state vibrations, which are important for practical applications. In this work, we demonstrate that the output power under an impulsive force can be increased significantly by placing a U-shaped metal component, called a dynamic magnifier (DM), under an MEMS piezoelectric vibration energy harvester (MEMS-pVEH) with a 6 mm long cantilever using a 3 μm thick Pb(Zr,Ti)O3 film. Based on the results of numerical calculations using a model of pVEH with a two-degree-of-freedom (2DOF) system, the DM was designed to have the same resonant frequency as the MEMS-pVEH and a high mechanical quality factor (). The waveforms of the output voltage of the fabricated 2DOF-pVEHs were measured for impulsive forces with various duration times, and the output power was calculated by integrating the waveforms over time. The output power of the MEMS-pVEH placed on the DM with a of 56 showed a gradual change according to the duration of applying an impulsive force and a maximum of 19 nJ/G2 (G: gravitational acceleration) when the duration of the impulsive force was 3.8 ms. This result was about 90 times greater than the output power of the MEMS-pVEH without a DM. While it is not easy to fabricate pVEHs with a complex 2DOF structure using only the MEMS process, we have demonstrated that the output power can be significantly improved by adding a spring structure to a simple MEMS-pVEH.
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24 October 2022
Research Article|
October 26 2022
Enhanced performance on piezoelectric MEMS vibration energy harvester by dynamic magnifier under impulsive force
Special Collection:
Piezoelectric Thin Films for MEMS
Sengsavang Aphayvong;
Sengsavang Aphayvong
(Formal analysis, Investigation, Visualization, Writing – original draft)
1
Osaka Metropolitan University
, Sakai, Osaka 599-8531, Japan
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Shuichi Murakami
;
Shuichi Murakami
(Investigation, Resources, Writing – review & editing)
2
Osaka Research Institute of Industrial Science and Technology
, Izumi, Osaka 594-1157, Japan
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Kensuke Kanda
;
Kensuke Kanda
(Methodology, Writing – review & editing)
3
University of Hyogo
, Himeji, Hyogo 671-2280, Japan
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Norifumi Fujimura
;
Norifumi Fujimura
(Resources, Supervision, Writing – review & editing)
1
Osaka Metropolitan University
, Sakai, Osaka 599-8531, Japan
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Takeshi Yoshimura
Takeshi Yoshimura
a)
(Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Resources, Software, Supervision, Validation, Visualization, Writing – original draft, Writing – review & editing)
1
Osaka Metropolitan University
, Sakai, Osaka 599-8531, Japan
a)Author to whom correspondence should be addressed: yoshimura@omu.ac.jp
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a)Author to whom correspondence should be addressed: yoshimura@omu.ac.jp
Note: This paper is part of the APL Special Collection on Piezoelectric Thin Films for MEMS.
Appl. Phys. Lett. 121, 172902 (2022)
Article history
Received:
July 29 2022
Accepted:
September 29 2022
Citation
Sengsavang Aphayvong, Shuichi Murakami, Kensuke Kanda, Norifumi Fujimura, Takeshi Yoshimura; Enhanced performance on piezoelectric MEMS vibration energy harvester by dynamic magnifier under impulsive force. Appl. Phys. Lett. 24 October 2022; 121 (17): 172902. https://doi.org/10.1063/5.0116838
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