Piezoelectric microelectromechanical systems (piezoMEMS) enable dense arrays of actuators which are often driven to higher electrical fields than their bulk piezoelectric counterparts. In bulk ceramics, high field driving causes internal heating of the piezoelectric, largely due to field-induced domain wall motion. Self-heating is then tracked as a function of vibration velocity to determine the upper bound for the drive levels. However, the literature is limited concerning self-heating in thin film piezoMEMS. In this work, it is shown that self-heating in piezoMEMS transducer arrays occurs due to domain wall motion and Ohmic losses. This was demonstrated via a systematic study of drive waveform dependence of self-heating in piezoMEMS arrays. In particular, the magnitude of self-heating was quantified as a function of different waveform parameters (e.g., amplitude, DC offset, and frequency). Thermal modeling of the self-heating of piezoMEMS using the measured hysteresis loss from electrical characterization as the heat source was found to be in excellent agreement with the experimental data. The self-heating model allows improved thermal design of piezoMEMS and can, furthermore, be utilized for functional heating, especially for device level poling.
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17 October 2022
Research Article|
October 20 2022
Heat generation in PZT MEMS actuator arrays
Special Collection:
Piezoelectric Thin Films for MEMS
Charalampos Fragkiadakis
;
Charalampos Fragkiadakis
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Validation, Visualization, Writing – review & editing)
1
aixACCT Systems GmbH
, Aachen, Germany
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Subramanian Sivaramakrishnan
;
Subramanian Sivaramakrishnan
(Conceptualization, Formal analysis, Investigation, Methodology, Validation, Visualization, Writing – original draft)
2
ARNDIT LLC
, Beaverton, Oregon 97007, USA
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Thorsten Schmitz-Kempen
;
Thorsten Schmitz-Kempen
(Conceptualization, Data curation, Formal analysis, Methodology, Validation, Visualization, Writing – review & editing)
1
aixACCT Systems GmbH
, Aachen, Germany
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Peter Mardilovich
;
Peter Mardilovich
a)
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Project administration, Resources, Supervision, Validation, Visualization, Writing – review & editing)
1
aixACCT Systems GmbH
, Aachen, Germany
a)Author to whom correspondence should be addressed: [email protected]
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Susan Trolier-McKinstry
Susan Trolier-McKinstry
(Conceptualization, Data curation, Formal analysis, Funding acquisition, Investigation, Methodology, Validation, Writing – review & editing)
3
Materials Science and Engineering Department and Materials Research Institute, The Pennsylvania State University
, University Park, Pennsylvania 16802, USA
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a)Author to whom correspondence should be addressed: [email protected]
Note: This paper is part of the APL Special Collection on Piezoelectric Thin Films for MEMS.
Appl. Phys. Lett. 121, 162906 (2022)
Article history
Received:
July 26 2022
Accepted:
September 24 2022
Citation
Charalampos Fragkiadakis, Subramanian Sivaramakrishnan, Thorsten Schmitz-Kempen, Peter Mardilovich, Susan Trolier-McKinstry; Heat generation in PZT MEMS actuator arrays. Appl. Phys. Lett. 17 October 2022; 121 (16): 162906. https://doi.org/10.1063/5.0114670
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