Springs are ubiquitous in a variety of scientific and engineering fields. However, the comprehensive study on mechanical properties of micro-spring has not been fully conducted yet due to a lack of reliable productions of varied-shaped micro-springs. Here, we report the design and manufacturing of triple-helix-shaped springs employing two-photon polymerization (TPP) technologies and present a systemic study on the mechanical properties of micro-springs particularly involving spring constants of k. To construct high-quality hollow microstructures, we optimize the TPP process by combining violet light post-treatment with a proper selection of cleaning liquid. Consequently, we demonstrate that the sensitives k can be actively tuned over a range of two orders of magnitude, from ∼1.5 to ∼108.2 μN/μm while maintaining a high resolution of ∼1 μN/μm. Furthermore, compression tests showcase an excellent agreement among all force-vs-displacement lineshapes, resulting in a small k fluctuation of <1%. On the whole, we expected that the modified TPP technique along with proposed helical springs opens an alternative avenue toward micro-scale force detection, leading to potential applications in the field of bio-sensing, where typical forces to be measured exist within a broad range from several piconewtons to several micronewtons.
References
1.
R.
Hooke
, “De potentia restitutiva, or of spring explaining the power of springing bodies
,” in Sixth Cutler Lecture
(John Martyn, 1678), Vol. 1678
, pp. 331
–356
; available at https://ota.bodleian.ox.ac.uk/repository/xmlui/handle/20.500.12024/A44322.2.
Y.
Chen
, “Nanofabrication by electron beam lithography and its applications: A review
,” Microelectron. Eng.
135
, 57
–72
(2015
).3.
M. L.
Tseng
, Z.-H.
Lin
, H. Y.
Kuo
, T.-T.
Huang
, Y.-T.
Huang
, T. L.
Chung
, C. H.
Chu
, J.-S.
Huang
, and D. P.
Tsai
, “Stress-induced 3D chiral fractal metasurface for enhanced and stabilized broadband near-field optical chirality
,” Adv. Opt. Mater.
7
, 1900617
(2019
).4.
D.
Zhao
, A.
Han
, and M.
Qiu
, “Ice lithography for 3D nanofabrication
,” Sci. Bull.
64
, 865
–871
(2019
).5.
N.
Wang
, M.
Zeisberger
, U.
Hübner
, and M. A.
Schmidt
, “Nanotrimer enhanced optical fiber tips implemented by electron beam lithography
,” Opt. Mater. Express
8
, 2246
–2255
(2018
).6.
Y.
Hong
, D.
Zhao
, J.
Wang
, J.
Lu
, G.
Yao
, D.
Liu
, H.
Luo
, Q.
Li
, and M.
Qiu
, “Solvent-free nanofabrication based on ice-assisted electron-beam lithography
,” Nano Lett.
20
, 8841
–8846
(2020
).7.
J.-F.
Xing
, M.-L.
Zheng
, and X.-M.
Duan
, “Two-photon polymerization microfabrication of hydrogels: An advanced 3D printing technology for tissue engineering and drug delivery
,” Chem. Soc. Rev.
44
, 5031
–5039
(2015
).8.
K.-S.
Lee
, D.-Y.
Yang
, S. H.
Park
, and R. H.
Kim
, “Recent developments in the use of two-photon polymerization in precise 2D and 3D microfabrications
,” Polym. Adv. Technol.
17
, 72
–82
(2006
).9.
Q.
Geng
, D.
Wang
, P.
Chen
, and S.-C.
Chen
, “Ultrafast multi-focus 3D nano-fabrication based on two-photon polymerization
,” Nat. Commun.
10
, 2179
(2019
).10.
M.
Deubel
, G.
Von Freymann
, M.
Wegener
, S.
Pereira
, K.
Busch
, and C. M.
Soukoulis
, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
,” Nat. Mater.
3
, 444
–447
(2004
).11.
J. K.
Gansel
, M.
Thiel
, M. S.
Rill
, M.
Decker
, K.
Bade
, V.
Saile
, G.
von Freymann
, S.
Linden
, and M.
Wegener
, “Gold helix photonic metamaterial as broadband circular polarizer
,” Science
325
, 1513
–1515
(2009
).12.
J. K.
Hohmann
, M.
Renner
, E. H.
Waller
, and G.
von Freymann
, “Three-dimensional μ-printing: An enabling technology
,” Adv. Opt. Mater.
3
, 1488
–1507
(2015
).13.
K.
Sugioka
and Y.
Cheng
, “Femtosecond laser three-dimensional micro-and nanofabrication
,” Appl. Phys. Rev.
1
, 041303
(2014
).14.
T.
Abele
, T.
Messer
, K.
Jahnke
, M.
Hippler
, M.
Bastmeyer
, M.
Wegener
, and K.
Göpfrich
, “Two-photon 3D laser printing inside synthetic cells
,” Adv. Mater.
34
, 2106709
(2022
).15.
T.
Bückmann
, N.
Stenger
, M.
Kadic
, J.
Kaschke
, A.
Frölich
, T.
Kennerknecht
, C.
Eberl
, M.
Thiel
, and M.
Wegener
, “Tailored 3d mechanical metamaterials made by dip-in direct-laser-writing optical lithography
,” Adv. Mater.
24
, 2710
–2714
(2012
).16.
J.
Purtov
, A.
Verch
, P.
Rogin
, and R.
Hensel
, “Improved development procedure to enhance the stability of microstructures created by two-photon polymerization
,” Microelectron. Eng.
194
, 45
–50
(2018
).17.
M.
Power
, A. J.
Thompson
, S.
Anastasova
, and G.-Z.
Yang
, “A monolithic force-sensitive 3D microgripper fabricated on the tip of an optical fiber using 2-photon polymerization
,” Small
14
, 1703964
(2018
).18.
A.
Nishiguchi
, A.
Mourran
, H.
Zhang
, and M.
Moller
, “In-gel direct laser writing for 3D-designed hydrogel composites that undergo complex self-shaping
,” Adv. Sci.
5
, 1700038
(2018
).19.
A. J.
Thompson
, M.
Power
, and G.-Z.
Yang
, “Micro-scale fiber-optic force sensor fabricated using direct laser writing and calibrated using machine learning
,” Opt. Express
26
, 14186
–14200
(2018
).20.
S.
Hu
, X.
Cao
, T.
Reddyhoff
, D.
Puhan
, S.-C.
Vladescu
, J.
Wang
, X.
Shi
, Z.
Peng
, A. J.
DeMello
, and D.
Dini
, “Liquid repellency enhancement through flexible microstructures
,” Sci. Adv.
6
, eaba9721
(2020
).21.
S.
Ushiba
, K.
Masui
, N.
Taguchi
, T.
Hamano
, S.
Kawata
, and S.
Shoji
, “Size dependent nanomechanics of coil spring shaped polymer nanowires
,” Sci. Rep.
5
, 17152
(2015
).22.
B.
Li
, B.
Gil
, M.
Power
, A.
Gao
, S.
Treratanakulchai
, S.
Anastasova
, and G.-Z.
Yang
, “Carbon-nanotube-coated 3D microspring force sensor for medical applications
,” ACS Appl. Mater. Interfaces
11
, 35577
–35586
(2019
).23.
E.
ToolBox
, see https://www.engineeringtoolbox.com/surface-tension-d\_962.html for “Liquids Surface Tension—Water, Mercury, Oils and More
(2005
)” (last accessed November 16, 2021).24.
D.
Zhu
and R.
Verduzco
, “Ultralow surface tension solvents enable facile cof activation with reduced pore collapse
,” ACS Appl. Mater. Interfaces
12
, 33121
–33127
(2020
).25.
R.
Deshpande
, D.-W.
Hua
, D. M.
Smith
, and C. J.
Brinker
, “Pore structure evolution in silica gel during aging/drying. III. Effects of surface tension
,” J. Non-Cryst. Solids
144
, 32
–44
(1992
).26.
X.
Li
, S.
Bi
, G.
Zhao
, P.
Lu
, and Y.
Wang
, “Experiment on liquid density and surface tension of nonafluorobutylmethylether
,” J. Xi'an Jiaotong Univ.
45
, 70
–73
(2011
).27.
M. W.
Seto
, B.
Dick
, and M. J.
Brett
, “Microsprings and microcantilevers: Studies of mechanical response
,” J. Micromech. Microeng.
11
, 582
(2001
).28.
29.
B.
Corp
., see https://www.brukerafmprobes.com/ for “Bruker AFM Probes Scanning Probe and Atomic Force Instrumentation
(2021
)” (last accessed November 12, 2021).30.
N.
Wang
, W.
Yan
, Y.
Qu
, S.
Ma
, S. Z.
Li
, and M.
Qiu
, “Intelligent designs in nanophotonics: From optimization towards inverse creation
,” PhotoniX
2
, 1
–35
(2021
).31.
E.
Bo
, X.
Ge
, Y.
Luo
, X.
Wu
, S.
Chen
, H.
Liang
, S.
Chen
, X.
Yu
, P.
Shum
, J.
Mo
et al., “Cellular-resolution in vivo tomography in turbid tissue through digital aberration correction
,” PhotoniX
1
, 9
(2020
).32.
R.
Fu
, Y.
Su
, R.
Wang
, X.
Lin
, X.
Jin
, H.
Yang
, W.
Du
, X.
Shan
, W.
Lv
, and G.
Huang
, “Single cell capture, isolation, and long-term in situ imaging using quantitative self-interference spectroscopy
,” Cytometry, Part A
99
, 601
–609
(2021
).33.
W.
Niu
, L.
Fang
, L.
Xu
, X.
Li
, H.
Ruikun
, D.
Guo
, and Z.
Qi
, “Summary of research status and application of mems accelerometers
,” J. Comput. Commun.
06
, 215
(2018
).34.
H. T.
Le
, R. I.
Haque
, Z.
Ouyang
, S. W.
Lee
, S. I.
Fried
, D.
Zhao
, M.
Qiu
, and A.
Han
, “Mems inductor fabrication and emerging applications in power electronics and neurotechnologies
,” Microsyst. Nanoeng.
7
, 59
(2021
).35.
J. U.
Surjadi
, L.
Gao
, H.
Du
, X.
Li
, X.
Xiong
, N. X.
Fang
, and Y.
Lu
, “Mechanical metamaterials and their engineering applications
,” Adv. Eng. Mater.
21
, 1800864
(2019
).36.
M. R.
Nejadnik
, H. C.
van der Mei
, W.
Norde
, and H. J.
Busscher
, “Bacterial adhesion and growth on a polymer brush-coating
,” Biomaterials
29
, 4117
–4121
(2008
).37.
M.
Zou
, C.
Liao
, S.
Liu
, C.
Xiong
, C.
Zhao
, J.
Zhao
, Z.
Gan
, Y.
Chen
, K.
Yang
, D.
Liu
et al., “Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements
,” Light: Sci. Appl.
10
, 171
(2021
).38.
K. C.
Neuman
and A.
Nagy
, “Single-molecule force spectroscopy: Optical tweezers, magnetic tweezers and atomic force microscopy
,” Nat. Methods
5
, 491
–505
(2008
).39.
F.
Chowdhury
, I. T.
Li
, T. T.
Ngo
, B. J.
Leslie
, B. C.
Kim
, J. E.
Sokoloski
, E.
Weiland
, X.
Wang
, Y. R.
Chemla
, T. M.
Lohman
et al., “Defining single molecular forces required for notch activation using nano yoyo
,” Nano Lett.
16
, 3892
–3897
(2016
).40.
P.
Saha
, T.
Duanis-Assaf
, and M.
Reches
, “Fundamentals and applications of fluidfm technology in single-cell studies
,” Adv. Mater. Interfaces
7
, 2001115
(2020
).© 2022 Author(s). Published under an exclusive license by AIP Publishing.
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