Thin-film gallium nitride (GaN) is a promising platform for phononic integrated circuits that hold great potential for scalable information processing processors. Here, an unsuspended traveling phononic resonator based on a high-acoustic-index-contrast mechanism is realized in GaN-on-Sapphire with a frequency up to 5 GHz, which matches the typical superconducting qubit frequency. A sixfold increment in quality factor is found when temperature decreases from room temperature (Q =5000) to 7K (Q =30 000), and thus, a frequency-quality factor product of 1.5×1014 is obtained. Higher quality factors should be available when the fabrication process is further optimized. Our system shows great potential in hybrid quantum devices via the so-called circuit quantum acoustodynamics.

1.
K.
Länge
,
B. E.
Rapp
, and
M.
Rapp
, “
Surface acoustic wave biosensors: A review
,”
Anal. Bioanal. Chem.
391
,
1509
(
2008
).
2.
B.
Liu
,
X.
Chen
,
H.
Cai
,
M. M.
Ali
,
X.
Tian
,
L.
Tao
,
Y.
Yang
, and
T.
Ren
, “
Surface acoustic wave devices for sensor applications
,”
J. Semicond.
37
,
021001
(
2016
).
3.
C.
Campbell
,
Surface Acoustic Wave Devices for Mobile and Wireless Communications, Four-Volume Set
(
Academic Press
,
1998
).
4.
C. H. W.
Barnes
,
J. M.
Shilton
, and
A. M.
Robinson
, “
Quantum computation using electrons trapped by surface acoustic waves
,”
Phys. Rev. B
62
,
8410
(
2000
).
5.
S.
Hermelin
,
S.
Takada
,
M.
Yamamoto
,
S.
Tarucha
,
A. D.
Wieck
,
L.
Saminadayar
,
C.
Bäuerle
, and
T.
Meunier
, “
Electrons surfing on a sound wave as a platform for quantum optics with flying electrons
,”
Nature
477
,
435
(
2011
).
6.
W. J. M.
Naber
,
T.
Fujisawa
,
H. W.
Liu
, and
W. G.
van der Wiel
, “
Surface-acoustic-wave-induced transport in a double quantum dot
,”
Phys. Rev. Lett.
96
,
136807
(
2006
).
7.
J. R.
Gell
,
M. B.
Ward
,
R. J.
Young
,
R. M.
Stevenson
,
P.
Atkinson
,
D.
Anderson
,
G. A. C.
Jones
,
D. A.
Ritchie
, and
A. J.
Shields
, “
Modulation of single quantum dot energy levels by a surface-acoustic-wave
,”
Appl. Phys. Lett.
93
,
081115
(
2008
).
8.
D. A.
Golter
,
T.
Oo
,
M.
Amezcua
,
K. A.
Stewart
, and
H.
Wang
, “
Optomechanical quantum control of a nitrogen-vacancy center in diamond
,”
Phys. Rev. Lett.
116
,
143602
(
2016
).
9.
D. A.
Golter
,
T.
Oo
,
M.
Amezcua
,
I.
Lekavicius
,
K. A.
Stewart
, and
H.
Wang
, “
Coupling a surface acoustic wave to an electron spin in diamond via a dark state
,”
Phys. Rev. X
6
,
041060
(
2016
).
10.
M. V.
Gustafsson
,
T.
Aref
,
A. F.
Kockum
,
M. K.
Ekstrom
,
G.
Johansson
, and
P.
Delsing
, “
Propagating phonons coupled to an artificial atom
,”
Science
346
,
207
(
2014
).
11.
Y.
Chu
,
P.
Kharel
,
W. H.
Renninger
,
L. D.
Burkhart
,
L.
Frunzio
,
P. T.
Rakich
, and
R. J.
Schoelkopf
, “
Quantum acoustics with superconducting qubits
,”
Science
358
,
199
(
2017
).
12.
K. J.
Satzinger
,
Y. P.
Zhong
,
H.-S.
Chang
,
G. A.
Peairs
,
A.
Bienfait
,
M.-H.
Chou
,
A. Y.
Cleland
,
C. R.
Conner
,
É.
Dumur
,
J.
Grebel
,
I.
Gutierrez
,
B. H.
November
,
R. G.
Povey
,
S. J.
Whiteley
,
D. D.
Awschalom
,
D. I.
Schuster
, and
A. N.
Cleland
, “
Quantum control of surface acoustic-wave phonons
,”
Nature
563
,
661
(
2018
).
13.
M.
Mirhosseini
,
A.
Sipahigil
,
M.
Kalaee
, and
O.
Painter
, “
Superconducting qubit to optical photon transduction
,”
Nature
588
,
599
(
2020
).
14.
G. S.
MacCabe
,
H.
Ren
,
J.
Luo
,
J. D.
Cohen
,
H.
Zhou
,
A.
Sipahigil
,
M.
Mirhosseini
, and
O.
Painter
, “
Nano-acoustic resonator with ultralong phonon lifetime
,”
Science
370
,
840
(
2020
).
15.
A.
Wallraff
,
D. I.
Schuster
,
A.
Blais
,
L.
Frunzio
,
R.-S.
Huang
,
J.
Majer
,
S.
Kumar
,
S. M.
Girvin
, and
R. J.
Schoelkopf
, “
Strong coupling of a single photon to a superconducting qubit using circuit quantum electrodynamics
,”
Nature
431
,
162–167
(
2004
).
16.
R.
Manenti
,
A. F.
Kockum
,
A.
Patterson
,
T.
Behrle
,
J.
Rahamim
,
G.
Tancredi
,
F.
Nori
, and
P. J.
Leek
, “
Circuit quantum acoustodynamics with surface acoustic waves
,”
Nat. Commun.
8
,
975
(
2017
).
17.
L.
Guo
,
A.
Grimsmo
,
A. F.
Kockum
,
M.
Pletyukhov
, and
G.
Johansson
, “
Giant acoustic atom: A single quantum system with a deterministic time delay
,”
Phys. Rev. A
95
,
053821
(
2017
).
18.
G.
Andersson
,
B.
Suri
,
L.
Guo
,
T.
Aref
, and
P.
Delsing
, “
Non-exponential decay of a giant artificial atom
,”
Nat. Phys.
15
,
1123
(
2019
).
19.
M. D.
Lahaye
,
J.
Suh
,
P. M.
Echternach
,
K. C.
Schwab
, and
M. L.
Roukes
, “
Nanomechanical measurements of a superconducting qubit
,”
Nature
459
,
960
(
2009
).
20.
A.
Bienfait
,
K. J.
Satzinger
,
Y. P.
Zhong
,
H.-S.
Chang
,
M.-H.
Chou
,
C. R.
Conner
,
É.
Dumur
,
J.
Grebel
,
G. A.
Peairs
,
R. G.
Povey
, and
A. N.
Cleland
, “
Phonon-mediated quantum state transfer and remote qubit entanglement
,”
Science
364
,
368
(
2019
).
21.
W.
Fu
,
Z.
Shen
,
Y.
Xu
,
C.-L.
Zou
,
R.
Cheng
,
X.
Han
, and
H. X.
Tang
, “
Phononic integrated circuitry and spin–orbit interaction of phonons
,”
Nat. Commun.
10
,
2743
(
2019
).
22.
W.
Wang
,
M.
Shen
,
C.-L.
Zou
,
W.
Fu
,
Z.
Shen
, and
H. X.
Tang
, “
High-acoustic-index-contrast phononic circuits: Numerical modeling
,”
J. Appl. Phys.
128
,
184503
(
2020
).
23.
F. M.
Mayor
,
W.
Jiang
,
C. J.
Sarabalis
,
T. P.
McKenna
,
J. D.
Witmer
, and
A. H.
Safavi-Naeini
, “
Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire
,”
Phys. Rev. Appl.
15
,
014039
(
2021
).
24.
L.
Shao
,
D.
Zhu
,
M.
Colangelo
,
D. H.
Lee
,
N.
Sinclair
,
Y.
Hu
,
P. T.
Rakich
,
K.
Lai
,
K. K.
Berggren
, and
M.
Loncar
, “
Electrical control of surface acoustic waves
,” arXiv:2101.01626 (
2021
).
25.
B. A.
Moores
,
L. R.
Sletten
,
J. J.
Viennot
, and
K. W.
Lehnert
, “
Cavity quantum acoustic device in the multimode strong coupling regime
,”
Phys. Rev. Lett.
120
,
227701
(
2018
).
26.
M.
Shen
,
J.
Xie
,
C.-L.
Zou
,
Y.
Xu
,
W.
Fu
, and
H. X.
Tang
, “
High frequency lithium niobate film-thickness-mode optomechanical resonator
,”
Appl. Phys. Lett.
117
,
131104
(
2020
).
27.
M.
Rais-Zadeh
,
V. J.
Gokhale
,
A.
Ansari
,
M.
Faucher
,
D.
Theron
,
Y.
Cordier
, and
L.
Buchaillot
, “
Gallium nitride as an electromechanical material
,”
J. Microelectromech. Syst.
23
,
1252
(
2014
).
28.
W.
Smith
,
H.
Gerard
,
J.
Collins
,
T.
Reeder
, and
H.
Shaw
, “
Design of surface wave delay lines with interdigital transducers
,”
IEEE Trans. Microwave Theory Tech.
17
,
865
(
1969
).
29.
M. F.
Limonov
,
M. V.
Rybin
,
A. N.
Poddubny
, and
Y. S.
Kivshar
, “
Fano resonances in photonics
,”
Nat. Photonics
11
,
543
(
2017
).
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