Superconducting quantum circuits are one of the leading quantum computing platforms. To advance superconducting quantum computing to a point of practical importance, it is critical to identify and address material imperfections that lead to decoherence. Here, we use terahertz scanning near-field optical microscopy to probe the local dielectric properties and carrier concentrations of wet-etched aluminum resonators on silicon, one of the most characteristic components of the superconducting quantum processors. Using a recently developed vector calibration technique, we extract the THz permittivity from spectroscopy in proximity to the microwave feedline. Fitting the extracted permittivity to the Drude model, we find that silicon in the etched channel has a carrier concentration greater than buffer oxide etched silicon and we explore post-processing methods to reduce the carrier concentrations. Our results show that near-field THz investigations can be used to quantitatively evaluate and identify inhomogeneities in quantum devices.
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Near-field terahertz nanoscopy of coplanar microwave resonators
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30 August 2021
Research Article|
August 30 2021
Near-field terahertz nanoscopy of coplanar microwave resonators
Special Collection:
Emerging Qubit Systems - Novel Materials, Encodings and Architectures
Xiao Guo
;
Xiao Guo
1
School of Information Technology and Electrical Engineering, The University of Queensland
, Brisbane QLD 4072, Australia
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Xin He
;
Xin He
2
School of Mathematics and Physics, The University of Queensland
, Brisbane QLD 4072, Australia
3
ARC Centre of Excellence for Engineered Quantum Systems
, Brisbane QLD 4072, Australia
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Zach Degnan
;
Zach Degnan
2
School of Mathematics and Physics, The University of Queensland
, Brisbane QLD 4072, Australia
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Bogdan C. Donose
;
Bogdan C. Donose
1
School of Information Technology and Electrical Engineering, The University of Queensland
, Brisbane QLD 4072, Australia
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Karl Bertling
;
Karl Bertling
1
School of Information Technology and Electrical Engineering, The University of Queensland
, Brisbane QLD 4072, Australia
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Arkady Fedorov
;
Arkady Fedorov
2
School of Mathematics and Physics, The University of Queensland
, Brisbane QLD 4072, Australia
3
ARC Centre of Excellence for Engineered Quantum Systems
, Brisbane QLD 4072, Australia
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Aleksandar D. Rakić
;
Aleksandar D. Rakić
a)
1
School of Information Technology and Electrical Engineering, The University of Queensland
, Brisbane QLD 4072, Australia
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Peter Jacobson
Peter Jacobson
a)
2
School of Mathematics and Physics, The University of Queensland
, Brisbane QLD 4072, Australia
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Note: This paper is part of the APL Special Collection on Emerging Qubit Systems - Novel Materials, Encodings and Architectures.
Appl. Phys. Lett. 119, 091101 (2021)
Article history
Received:
June 23 2021
Accepted:
July 22 2021
Citation
Xiao Guo, Xin He, Zach Degnan, Bogdan C. Donose, Karl Bertling, Arkady Fedorov, Aleksandar D. Rakić, Peter Jacobson; Near-field terahertz nanoscopy of coplanar microwave resonators. Appl. Phys. Lett. 30 August 2021; 119 (9): 091101. https://doi.org/10.1063/5.0061078
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