Recent studies of lead halide perovskites demonstrate outstanding optoelectronic properties for thin-film semiconductor device application. Perovskite photovoltaic and light-emitting diodes are on the way to the mass production and spread in commercial semiconductor devices. The lab-to-fab transition of perovskite devices requires adaptation of perovskite deposition methods to industrial semiconductor fabrication standards. In this work, we demonstrated the formation of highly luminescence perovskite films by single-source chemical vapor deposition (ssCVD). Several stoichiometry compositions were prepared from inorganic precursors of CsBr and PbBr2 by dry mechanochemical synthesis with following evaporation. The combination of mechanochemical synthesis and ssCVD is an attractive approach due to the ability to scale up to industrial level and the precise control over the evaporation rate with a single source. Among all compositions CsBr:PbBr2, we show that CsPb2Br5 maintains phase composition and photoluminescent properties for powder and film. This work provides a comparative study of evaporated film properties (PL, XRD, TEM) and modeling calculations of interphase optical transitions.

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