Electret-based microelectromechanical system (MEMS) vibratory energy harvesting is a key technology for converting the mechanical energy of environmental vibrations into electricity. Unfortunately, conventional electret charging methods generally rely on high-voltage and high-temperature processes that present limitations to MEMS design and production. Here, we show a MEMS post-processed self-assembled electret (SAE) that enables the integration of electrets with MEMS vibratory devices via evaporation as a post-MEMS process. Owing to the spontaneous orientation of polar molecules, the surface potential of the SAE can build up at room temperature in a microscopic region without charging processes, which enhances the design and fabrication flexibility of electret-based MEMS energy harvesters. We develop a MEMS vibratory device followed by post-processing the SAE and confirm induced electrical currents caused by the electrical field of the SAE at the vibrational input. This SAE-based MEMS technology is a promising design guideline for highly integrated single-chip MEMS vibratory energy harvesters.
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20 December 2021
Research Article|
December 20 2021
MEMS post-processed self-assembled electret for vibratory energy harvesters
Daisuke Yamane
;
Daisuke Yamane
a)
1
Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University
, Kusatsu 525-8577, Japan
2
Japan Science and Technology Agency, PRESTO
, Kawaguchi 332-0012, Japan
a)Authors to whom correspondence should be addressed: dyamane@fc.ritsumei.ac.jp and y-tanaka@chiba-u.jp
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Hideyuki Kayaguchi;
Hideyuki Kayaguchi
3
Graduate School of Science and Engineering, Chiba University
, Chiba 263-8522, Japan
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Kosuke Kawashima;
Kosuke Kawashima
1
Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University
, Kusatsu 525-8577, Japan
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Hisao Ishii
;
Hisao Ishii
3
Graduate School of Science and Engineering, Chiba University
, Chiba 263-8522, Japan
4
Center for Frontier Science, Chiba University
, Chiba 263-8522, Japan
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Yuya Tanaka
Yuya Tanaka
a)
2
Japan Science and Technology Agency, PRESTO
, Kawaguchi 332-0012, Japan
3
Graduate School of Science and Engineering, Chiba University
, Chiba 263-8522, Japan
4
Center for Frontier Science, Chiba University
, Chiba 263-8522, Japan
a)Authors to whom correspondence should be addressed: dyamane@fc.ritsumei.ac.jp and y-tanaka@chiba-u.jp
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a)Authors to whom correspondence should be addressed: dyamane@fc.ritsumei.ac.jp and y-tanaka@chiba-u.jp
Appl. Phys. Lett. 119, 254102 (2021)
Article history
Received:
September 23 2021
Accepted:
December 08 2021
Citation
Daisuke Yamane, Hideyuki Kayaguchi, Kosuke Kawashima, Hisao Ishii, Yuya Tanaka; MEMS post-processed self-assembled electret for vibratory energy harvesters. Appl. Phys. Lett. 20 December 2021; 119 (25): 254102. https://doi.org/10.1063/5.0072596
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