We characterize niobium nitride (NbN) coplanar waveguide resonators, which were fabricated from a 10-nm-thick film on silicon dioxide grown by sputter deposition. For films grown at 180 °C, we report a superconducting critical temperature of 7.4 K associated with a normal square resistance of , leading to a kinetic inductance of 192 pH/◻. We fabricated resonators with a characteristic impedance up to and internal quality factors in the single photon regime at zero magnetic field. Moreover, in the many photon regime, the resonators present a high magnetic field resilience with in a 6 T in-plane magnetic field and in a 300 mT out-of-plane magnetic field. These findings make such resonators a compelling choice for circuit quantum electrodynamics experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.
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