We characterize niobium nitride (NbN) coplanar waveguide resonators, which were fabricated from a 10-nm-thick film on silicon dioxide grown by sputter deposition. For films grown at 180 °C, we report a superconducting critical temperature of 7.4 K associated with a normal square resistance of , leading to a kinetic inductance of 192 pH/◻. We fabricated resonators with a characteristic impedance up to and internal quality factors in the single photon regime at zero magnetic field. Moreover, in the many photon regime, the resonators present a high magnetic field resilience with in a 6 T in-plane magnetic field and in a 300 mT out-of-plane magnetic field. These findings make such resonators a compelling choice for circuit quantum electrodynamics experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.
Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators
Cécile Xinqing Yu, Simon Zihlmann, Gonzalo Troncoso Fernández-Bada, Jean-Luc Thomassin, Frédéric Gustavo, Étienne Dumur, Romain Maurand; Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators. Appl. Phys. Lett. 1 February 2021; 118 (5): 054001. https://doi.org/10.1063/5.0039945
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