Using a hydrothermal method, (K0.88Na0.12)NbO3 films were deposited at 240 °C on (100) cSrRuO3//(100)SrTiO3 substrates. Moreover, without any poling treatment, direct and inverse transverse piezoelectric coefficients, e31,f, near 0 kV/cm were approximately −5.0 C/m2 for the as-deposited film. This value was nearly unchanged following the application of an electric field and poling treatment, suggesting that as-deposited films are almost in a fully self-polarized state without the application of an electric field. As-deposited films with a thickness of up to 22 μm showed constant piezoelectricity without any poling treatment. The films did not crack or peel because of substrates due to the small thermal strain originating from the low deposition temperature. The figures of merit (FOM) for the vibration energy harvester [FOM = e31,f2/(ε0εr)] and sensor [FOM = e31,f/(ε0εr)] were estimated to be good at 32.8 GPa and –5.9 GV/m, respectively, primarily because of the low relative dielectric constant of ∼110. Furthermore, the piezoelectric voltage coefficient g31 [= d31/(ε0εr)] was estimated and demonstrated a high value of 0.073 Vm/N.
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5 October 2020
Research Article|
October 06 2020
Good piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240 °C) using a hydrothermal method
Akinori Tateyama;
Akinori Tateyama
1
Department of Materials Science and Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
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Yoshiharu Ito;
Yoshiharu Ito
1
Department of Materials Science and Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
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Yoshiko Nakamura;
Yoshiko Nakamura
1
Department of Materials Science and Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
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Takao Shimizu
;
Takao Shimizu
1
Department of Materials Science and Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
2
Research Center for Functional Materials, National Institute for Materials Science (NIMS)
Tsukuba 305-0044, Japan
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Yuichiro Orino;
Yuichiro Orino
3
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
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Minoru Kurosawa;
Minoru Kurosawa
3
Department of Electrical and Electronic Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
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Hiroshi Uchida
;
Hiroshi Uchida
4
Department of Materials and Life Sciences, Sophia University
, Tokyo 102-8554, Japan
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Takahisa Shiraishi
;
Takahisa Shiraishi
5
Department of Institute for Materials Research, Tohoku University
, Sendai 980-8577, Japan
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Takanori Kiguchi
;
Takanori Kiguchi
5
Department of Institute for Materials Research, Tohoku University
, Sendai 980-8577, Japan
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Toyohiko J. Konno
;
Toyohiko J. Konno
5
Department of Institute for Materials Research, Tohoku University
, Sendai 980-8577, Japan
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Takeshi Yoshimura
;
Takeshi Yoshimura
6
Department of Physics and Electronics, Osaka Prefecture University
, Osaka 599-8531, Japan
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Hiroshi Funakubo
Hiroshi Funakubo
a)
1
Department of Materials Science and Engineering, Tokyo Institute of Technology
, Yokohama 226-8502, Japan
a)Author to whom correspondence should be addressed: funakubo.h.aa@m.titech.ac.jp
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a)Author to whom correspondence should be addressed: funakubo.h.aa@m.titech.ac.jp
Appl. Phys. Lett. 117, 142903 (2020)
Article history
Received:
June 11 2020
Accepted:
August 27 2020
Citation
Akinori Tateyama, Yoshiharu Ito, Yoshiko Nakamura, Takao Shimizu, Yuichiro Orino, Minoru Kurosawa, Hiroshi Uchida, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Takeshi Yoshimura, Hiroshi Funakubo; Good piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240 °C) using a hydrothermal method. Appl. Phys. Lett. 5 October 2020; 117 (14): 142903. https://doi.org/10.1063/5.0017990
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