In phase change memory cells, the majority of heat is lost through the electrodes during the programming process, which leads to significant drops in the performance of the memory device. In this Letter, we report on the thermal properties of thin film carbon nitride with a modest electrical resistivity of 5–10 mΩ cm, a low thermal conductivity of 1.47 ± 0.09 W m−1 K–1, and a low interfacial thermal conductance between carbon nitride and phase change material for length scales below 40 nm. The thermally insulating property of carbon nitride makes it a suitable thermal barrier, allowing for less heat loss during Joule heating within the memory unit. We compare the thermal properties of carbon nitride against the commonly used electrodes and insulators such as tungsten and silicon nitride, respectively, to demonstrate the promise of carbon nitride as a potential material candidate for electrode applications in phase change memory devices.
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27 January 2020
Research Article|
January 28 2020
Thermal properties of carbon nitride toward use as an electrode in phase change memory devices
K. Aryana;
K. Aryana
1
Department of Mechanical and Aerospace Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
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J. T. Gaskins
;
J. T. Gaskins
1
Department of Mechanical and Aerospace Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
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J. Nag;
J. Nag
2
Western Digital Corporation
, San Jose, California 95119, USA
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J. C. Read;
J. C. Read
2
Western Digital Corporation
, San Jose, California 95119, USA
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D. H. Olson
;
D. H. Olson
1
Department of Mechanical and Aerospace Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
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M. K. Grobis;
M. K. Grobis
2
Western Digital Corporation
, San Jose, California 95119, USA
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P. E. Hopkins
P. E. Hopkins
a)
1
Department of Mechanical and Aerospace Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
3
Department of Materials Science and Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
4
Department of Physics, University of Virginia
, Charlottesville, Virginia 22904, USA
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K. Aryana
1
J. T. Gaskins
1
J. Nag
2
J. C. Read
2
D. H. Olson
1
M. K. Grobis
2
P. E. Hopkins
1,3,4,a)
1
Department of Mechanical and Aerospace Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
2
Western Digital Corporation
, San Jose, California 95119, USA
3
Department of Materials Science and Engineering, University of Virginia
, Charlottesville, Virginia 22904, USA
4
Department of Physics, University of Virginia
, Charlottesville, Virginia 22904, USA
a)
Electronic mail: [email protected]
Appl. Phys. Lett. 116, 043502 (2020)
Article history
Received:
October 29 2019
Accepted:
January 10 2020
Citation
K. Aryana, J. T. Gaskins, J. Nag, J. C. Read, D. H. Olson, M. K. Grobis, P. E. Hopkins; Thermal properties of carbon nitride toward use as an electrode in phase change memory devices. Appl. Phys. Lett. 27 January 2020; 116 (4): 043502. https://doi.org/10.1063/1.5134075
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