It has been established that hydrogen (H) plays a key role in p-type doping of GaN and it must be removed by dissociation of the Mg–H complex in order to achieve p-type conductivity. However, in carbon (C)-doped semi-insulating GaN, which is the core component of power electronic devices, the role of H, especially the formation and dissociation process of C–H defects, has remained to date a mystery. In this work, we provide a direct evidence for the interaction between H and C in the form of the CNHi complex in as-grown C-doped GaN. The complex can be dissociated into CN and H+ after post-growth annealing. The activation energy is estimated to be about 2.3–2.5 eV from the temperature-dependent annealing experiments. Our study reveals that the CNHi complex plays an essential role in understanding the variation of optical and electronic properties of C-doped GaN.

1.
S.
Limpijumnong
,
J. E.
Northrup
, and
C. G.
Van de Walle
,
Phys. Rev. Lett.
87
,
205505
(
2001
).
2.
C. G.
Van de Walle
and
J.
Neugebauer
,
Annu. Rev. Mater. Res.
36
,
179
189
(
2006
).
3.
B.
Clerjaud
,
F.
Gendron
,
M.
Krause
, and
W.
Ulrici
,
Phys. Rev. Lett.
65
,
1800
(
1990
).
4.
R. R.
Blanchard
,
J. A.
del Alamo
,
P. C.
Chao
, and
S. B.
Adams
, in
IEEE
IEDM (
1998
), pp.
231
234
.
5.
O.
Gelhausen
,
M. R.
Phillips
,
E. M.
Goldys
,
T.
Paskova
,
B.
Monemar
,
M.
Strassburg
, and
A.
Hoffmann
,
Phys. Rev. B
69
,
125210
(
2004
).
6.
J.
Neugebauer
and
C. G.
Van de Walle
,
Phys. Rev. Lett.
75
,
4452
(
1995
).
7.
M.
Matsubara
and
E.
Bellotti
,
J. Appl. Phys.
121
,
195702
(
2017
).
8.
S.
Suihkonen
,
S.
Pimputkar
,
J. S.
Speck
, and
S.
Nakamura
,
Appl. Phys. Lett.
108
,
202105
(
2016
).
9.
F. A.
Reboredo
and
S. T.
Pantelides
,
Phys. Rev. Lett.
82
,
1887
(
1999
).
10.
S.
Nakamura
,
N.
Iwasa
,
M.
Senoh
, and
T.
Mukai
,
Jpn. J. Appl. Phys., Part 1
31
,
1258
1266
(
1992
).
11.
M. J.
Uren
,
J.
Moreke
, and
M.
Kuball
,
IEEE Trans. Electron Dev.
59
,
3327
(
2012
).
12.
C. R.
Abernathy
,
J. D.
MacKenzie
, and
S. J.
Pearton
,
Appl. Phys. Lett.
66
,
1969
(
1995
).
13.
D. J.
As
,
U.
Koehler
,
M.
Luebbers
,
J.
Mimkes
, and
K.
Lischika
,
Phys. Status Solidi A
188
,
699
703
(
2001
).
14.
J.
Glaab
,
J.
Ruschel
,
T.
Kolbe
,
A.
Knauer
,
J.
Rass
,
H. K.
Cho
,
N. L.
Ploch
,
S.
Kreutzmann
,
S.
Einfeldt
,
M.
Weyers
, and
M.
Kneissl
,
IEEE Photonics Technol. Lett.
31
,
529
532
(
2019
).
15.
Y. Q.
Chen
,
Y. C.
Zhang
,
Y.
Liu
,
X. Y.
Liao
,
Y. F.
En
,
W. X.
Fang
, and
Y.
Huang
,
IEEE Trans. Electron Dev.
65
,
1321
1326
(
2018
).
16.
Y. S.
Puzyrev
,
T.
Roy
,
M.
Beck
,
B. R.
Tuttle
,
R. D.
Schrimpf
,
D. M.
Fleetwood
, and
S. T.
Pantelides
,
J. Appl. Phys.
109
,
034501
(
2011
).
17.
R.
Wang
,
J. X.
Xu
,
S. Y.
Zhang
,
Z.
Cheng
,
L.
Zhang
,
P. H.
Zheng
,
F. X.
Chen
,
X. D.
Tong
,
Y.
Zhang
, and
W.
Tan
,
Appl. Phys. Lett.
115
,
143504
(
2019
).
18.
S.
Wu
,
X. L.
Yang
,
H. S.
Zhang
,
L.
Shi
,
Q.
Zhang
,
Q. Y.
Shang
,
Z. M.
Qi
,
Y.
Xu
,
J.
Zhang
,
N.
Tang
,
X. Q.
Wang
,
W. K.
Ge
,
K.
Xu
, and
B.
Shen
,
Phys. Rev. Lett.
121
,
145505
(
2018
).
19.
J. L.
Lyons
,
A.
Janotti
, and
C. G.
Van de Walle
,
Phys. Rev. B
89
,
035204
(
2014
).
20.
M. A.
Reshchikov
,
M.
Vorobiov
,
D. O.
Demchenko
,
Ü.
Özgür
,
H.
Morkoç
,
A.
Lesnik
,
M. P.
Hoffmann
,
F.
Hörich
,
A.
Dadgar
, and
A.
Strittmatter
,
Phys. Rev. B
98
,
125207
(
2018
).
21.
D. O.
Demchenko
,
I. C.
Diallo
, and
M. A.
Reshchikov
,
Phys. Rev. Lett.
110
,
087404
(
2013
).
22.
S. G.
Christenson
,
W. Y.
Xie
,
Y. Y.
Sun
, and
S. B.
Zhang
,
J. Appl. Phys.
118
,
135708
(
2015
).
23.
D. O.
Demchenko
,
I. C.
Diallo
, and
M. A.
Reshchikov
,
J. Appl. Phys.
119
,
035702
(
2016
).
24.
M.
Matsubara
and
E.
Bellotti
,
J. Appl. Phys.
121
,
195701
(
2017
).
25.
D. V.
Lang
and
R. A.
Logan
,
Phys. Rev. Lett.
39
,
635
(
1977
).
26.
M.
Feneberg
,
N. T.
Son
, and
A.
Kakanakova-Georgieva
,
Appl. Phys. Lett.
106
,
242101
(
2015
).
27.
A.
Kyrtsos
,
M.
Matsubara
, and
E.
Bellotti
,
Phys. Rev. B
93
,
245201
(
2016
).
28.
W.
Gotz
,
N. M.
Johnson
,
J.
Walker
,
D. P.
Bour
, and
R. A.
Street
,
Appl. Phys. Lett.
68
,
667
669
(
1996
).
29.
J. B.
Webb
,
H.
Tang
,
S.
Rolfe
, and
J. A.
Bardwell
,
Appl. Phys. Lett.
75
(
7
),
953
(
1999
).
30.
C. H.
Seager
,
A. F.
Wright
,
J.
Yu
, and
W.
Gotz
,
J. Appl. Phys.
92
,
6553
6560
(
2002
).
31.
M. E.
Zvanut
,
S.
Paudel
,
U. R.
Sunay
,
W. R.
Willoughby
,
M.
Iwinska
,
T.
Sochacki
, and
M.
Bockowski
,
J. Appl. Phys.
124
,
075701
(
2018
).
32.
L.
Sugiura
,
M.
Suzuki
, and
J.
Nishio
,
Appl. Phys. Lett.
72
,
1748
(
1998
).
33.
Y.
Xu
,
X. L.
Yang
,
P.
Zhang
,
X. Z.
Cao
,
Y.
Chen
,
S. P.
Guo
,
S.
Wu
,
J.
Zhang
,
Y. X.
Feng
,
F. J.
Xu
,
X. Q.
Wang
,
W. K.
Ge
, and
B.
Shen
,
Appl. Phys. Express
12
,
061002
(
2019
).
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