We report an extensive analysis of the time-dependent breakdown of E-mode GaN-on-Si power HEMTs subjected to positive gate stress and demonstrate that TTF (time-to-failure) has a positive temperature dependence. The analyzed devices have a p-type gate; large (60 A) power transistors were subjected to positive stress at different voltages and temperatures ranging from 25 °C to 250 °C. The original results collected in this paper demonstrate that (i) constant voltage stress induces a gradual decrease in gate leakage current, which is ascribed to hole-trapping in Mg-acceptors located at the p-GaN/AlGaN interface; (ii) this trapping process becomes less pronounced at high temperatures, due to a faster detrapping from the shallow Mg-related traps; (iii) the devices stressed at the same voltage and different temperatures show a similar initial gate leakage, due to the fact that in the analyzed regime, gate conduction is dominated by Fowler-Nordheim tunneling, a field-related, rather than thermally activated, process; (iv) the time-to-failure has a positive temperature dependence. The latter result is explained by considering that time-dependent breakdown occurs due to the accumulation of positive charges at the p-GaN/AlGaN interface, which results in an increased injection of 2DEG electrons into the p-GaN layer, where they are accelerated by the electric field. High temperatures favor the detrapping of holes, thus reducing this process and leading to a better stability.
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29 July 2019
Research Article|
July 30 2019
Positive temperature dependence of time-dependent breakdown of GaN-on-Si E-mode HEMTs under positive gate stress
F. Masin
;
F. Masin
a)
1
Department of Information Engineering, University of Padova
, via Gradenigo 6/B, 35131 Padova, Italy
a)Author to whom correspondence should be addressed: [email protected]
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M. Meneghini
;
M. Meneghini
1
Department of Information Engineering, University of Padova
, via Gradenigo 6/B, 35131 Padova, Italy
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E. Canato;
E. Canato
1
Department of Information Engineering, University of Padova
, via Gradenigo 6/B, 35131 Padova, Italy
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C. De Santi;
C. De Santi
1
Department of Information Engineering, University of Padova
, via Gradenigo 6/B, 35131 Padova, Italy
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A. Stockman
;
A. Stockman
2
ON Semiconductor, Belgium and University of Ghent
, Technologiepark 126, 9000 Ghent, Belgium
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E. Zanoni
;
E. Zanoni
1
Department of Information Engineering, University of Padova
, via Gradenigo 6/B, 35131 Padova, Italy
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P. Moens;
P. Moens
3
ON Semiconductor
, Westerring 15, 9700 Oudenaarde, Belgium
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G. Meneghesso
G. Meneghesso
1
Department of Information Engineering, University of Padova
, via Gradenigo 6/B, 35131 Padova, Italy
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a)Author to whom correspondence should be addressed: [email protected]
Appl. Phys. Lett. 115, 052103 (2019)
Article history
Received:
May 08 2019
Accepted:
July 09 2019
Citation
F. Masin, M. Meneghini, E. Canato, C. De Santi, A. Stockman, E. Zanoni, P. Moens, G. Meneghesso; Positive temperature dependence of time-dependent breakdown of GaN-on-Si E-mode HEMTs under positive gate stress. Appl. Phys. Lett. 29 July 2019; 115 (5): 052103. https://doi.org/10.1063/1.5109301
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