Enhancing the output power at small input acceleration is a major concern for enabling practical application of vibration energy harvesters. In this study, a two-degree of freedom system (2-DOF) was employed to solve this issue. The numerical calculations using the lumped parameter model of the piezoelectric vibration energy harvesters (pVEHs) with 2-DOF indicate that the harvesters show two resonance peak and an increase in the output power of several ten times compared with the harvester with a single degree of freedom. Based on calculations, the prototype of pVEH with 2-DOF was fabricated using a micro-machined pVEH and a metal cantilever. The output power of the harvester is 3.4 μW at 0.1 Grms, which is 17 times higher than that of the micro-electro-mechanical system-pVEH. Moreover, the resonance frequency on the pVEH with 2-DOF is easily adjusted because of the coupled vibration of the two masses.

1.
S.
Sudevalaym
and
P.
Kulkarni
,
IEEE Commun. Surv. Tutorials
13
,
443
(
2011
).
2.
R. J. M.
Vullers
,
R.
van Schaijk
,
I.
Doms
,
C.
van Hoof
, and
R.
Mertens
,
Solid-State Electron.
53
,
684
(
2009
).
3.
4.
S. G.
Kim
,
S.
Priya
, and
I.
Kanno
,
MRS Bull.
37
,
1039
(
2012
).
5.
S.
Trolier- McKinstry
and
P.
Muralt
,
J. Electroceram.
12
,
7
(
2004
).
6.
H.
Liu
,
J.
Zhong
,
C.
Lee
,
S. W.
Lee
, and
L.
Lin
,
Appl. Phys. Rev.
5
,
041306
(
2018
).
7.
A.
Erturk
,
J.
Hoffman
, and
D. J.
Inman
,
Appl. Phys. Lett.
94
,
254102
(
2009
).
8.
S.
Leadenham
and
A.
Erturk
,
Smart Mater. Struct.
24
,
055021
(
2015
).
9.
M.
Renaud
,
K.
Karakaya
,
T.
Sterken
,
P.
Fiorini
,
C.
Van Hoof
, and
R.
Pures
,
Sens. Actuators, A
145-146
,
380
(
2008
).
10.
M.
Aramaki
,
K.
Izumi
,
T.
Yoshimura
,
S.
Murakami
,
K.
Satoh
,
K.
Kanda
, and
N.
Fujimura
,
Jpn. J. Appl. Phys. Part 1
57
,
11UD03
(
2018
).
11.
M.
Aramaki
,
T.
Yoshimura
,
S.
Murakami
,
K.
Satoh
, and
N.
Fujimura
, “
Demonstration of high-performance piezoelectric MEMS vibration energy harvester using BiFeO3 film with improved electromechanical coupling factor
,”
Sens. Actuators A
(submitted).
12.
H. G.
Yeo
and
S.
Trolier- McKinstry
,
Sens. Actuators, A
273
,
90
(
2018
).
13.
S.
Murakami
,
T.
Yoshimura
,
K.
Satoh
,
K.
Wakazono
,
K.
Kariya
, and
N.
Fujimura
,
J. Phys.: Conf. Ser.
476
,
012007
(
2013
).
14.
C. L.
Kuo
,
S. C.
Lin
, and
W. J.
Wu
,
Smart Mater. Struct.
25
,
105016
(
2016
).
15.
H.
Wang
and
L.
Tang
,
Mech. Syst. Signal Process.
86
,
29
(
2017
).
16.
K.
Tao
,
H.
Yi
,
L.
Tang
,
J.
Wu
,
P.
Wang
,
N.
Wang
,
L.
Hu
,
Y.
Fu
,
J.
Miao
, and
H.
Chang
,
Surf. Coat. Technol.
359
,
289
(
2019
).

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