We evaluate the performance of hybrid microwave resonators made by combining sputtered Nb thin films with Tungsten nanowires grown with a He-beam induced deposition technique. Depending on growth conditions, the nanowires have a typical width nm and thickness nm. We observe a high normal state resistance which together with a critical temperature ensures a high kinetic inductance making the resonator strongly nonlinear. Both lumped and coplanar waveguide resonators were fabricated and measured at low temperature exhibiting internal quality factors up to 3990 at 4.5 GHz in the few photon regime. Analyzing the wire length, temperature, and microwave power dependence, we extracted a kinetic inductance for the W nanowire of , which is 250 times higher than the geometrical inductance, and a Kerr non-linearity as high as at 4.5 GHz. The nanowires made with the helium focused ion beam are thus versatile objects to engineer compact, high impedance, superconducting environments with a mask and resist free direct write process.
Skip Nav Destination
Article navigation
11 March 2019
Research Article|
March 13 2019
High kinetic inductance microwave resonators made by He-Beam assisted deposition of tungsten nanowires Available to Purchase
J. Basset
;
J. Basset
a)
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
a)Author to whom correspondence should be addressed: [email protected]
Search for other works by this author on:
D. Watfa
;
D. Watfa
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
G. Aiello;
G. Aiello
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
M. Féchant;
M. Féchant
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
A. Morvan;
A. Morvan
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
J. Estève
;
J. Estève
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
J. Gabelli
;
J. Gabelli
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
M. Aprili;
M. Aprili
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
R. Weil;
R. Weil
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
A. Kasumov;
A. Kasumov
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
H. Bouchiat
;
H. Bouchiat
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
R. Deblock
R. Deblock
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Search for other works by this author on:
J. Basset
a)
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
G. Aiello
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
M. Féchant
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
A. Morvan
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
J. Estève
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
J. Gabelli
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
M. Aprili
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
R. Weil
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
A. Kasumov
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
H. Bouchiat
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
R. Deblock
Laboratoire de Physique des Solides, CNRS, Université Paris-Sud, Université Paris Saclay
, 91405 Orsay Cedex, France
a)Author to whom correspondence should be addressed: [email protected]
Appl. Phys. Lett. 114, 102601 (2019)
Article history
Received:
November 12 2018
Accepted:
March 02 2019
Citation
J. Basset, D. Watfa, G. Aiello, M. Féchant, A. Morvan, J. Estève, J. Gabelli, M. Aprili, R. Weil, A. Kasumov, H. Bouchiat, R. Deblock; High kinetic inductance microwave resonators made by He-Beam assisted deposition of tungsten nanowires. Appl. Phys. Lett. 11 March 2019; 114 (10): 102601. https://doi.org/10.1063/1.5080925
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Roadmap on photonic metasurfaces
Sebastian A. Schulz, Rupert. F. Oulton, et al.
High breakdown voltage normally off Ga2O3 transistors on silicon substrates using GaN buffer
Mritunjay Kumar, Vishal Khandelwal, et al.
Attosecond physics and technology
O. Alexander, D. Ayuso, et al.
Related Content
Bismuth nanowires with in situ shadow deposited Josephson junctions
Appl. Phys. Lett. (August 2022)