Highly P doped Ge layers are proposed as a material to realize an on-chip laser for optical interconnect applications. In this work, we demonstrate that these donor impurities have a dramatic impact on the excess carrier lifetime and introduce detrimental many-body effects such as linewidth broadening in the gain medium. Linewidth broadening Γopt = 10 meV for undoped Ge and Γopt ≥ 45 meV for Ge with a doping level up to 5.4 × 1019 cm−3 were extracted using photoluminescence spectroscopy and pump-probe spectroscopy. In addition, we observed that the excess carrier lifetime (τc) drops by more than an order of magnitude from 3 ns in undoped Ge to <0.3 ns in doped Ge.

1.
H.
Chen
,
P.
Verheyen
,
P.
De Heyn
,
G.
Lepage
,
J.
De Coster
,
S.
Balakrishnan
,
P.
Absil
,
W.
Yao
,
L.
Shen
,
G.
Roelkens
 et al., “
−1 V bias 67 GHz bandwidth Si-contacted germanium waveguide pin photodetector for optical links at 56 Gbps and beyond
,”
Opt. Express
24
,
4622
4631
(
2016
).
2.
S. A.
Srinivasan
,
M.
Pantouvaki
,
S.
Gupta
,
H. T.
Chen
,
P.
Verheyen
,
G.
Lepage
,
G.
Roelkens
,
K.
Saraswat
,
D.
Van Thourhout
,
P.
Absil
 et al., “
56 Gb/s germanium waveguide electro-absorption modulator
,”
J. Lightwave Technol.
34
,
419
424
(
2016
).
3.
P.
De Heyn
,
J.
De Coster
,
P.
Verheyen
,
G.
Lepage
,
M.
Pantouvaki
,
P.
Absil
,
W.
Bogaerts
,
J.
Van Campenhout
, and
D.
Van Thourhout
, “
Fabrication-tolerant four-channel wavelength-division-multiplexing filter based on collectively tuned Si microrings
,”
J. Lightwave Technol.
31
,
3085
3092
(
2013
).
4.
D.
Taillaert
,
F.
Van Laere
,
M.
Ayre
,
W.
Bogaerts
,
D.
Van Thourhout
,
P.
Bienstman
, and
R.
Baets
, “
Grating couplers for coupling between optical fibers and nanophotonic waveguides
,”
Jpn. J. Appl. Phys., Part 1
45
,
6071
(
2006
).
5.
M.
Pantouvaki
,
S.
Srinivasan
,
Y.
Ban
,
P.
De Heyn
,
P.
Verheyen
,
G.
Lepage
,
H.
Chen
,
J.
De Coster
,
N.
Golshani
,
S.
Balakrishnan
 et al., “
Active components for 50 Gb/s NRZ-OOK optical interconnects in a silicon photonics platform
,”
J. Lightwave Technol.
35
,
631
638
(
2017
).
6.
Y.
Shimura
,
S. A.
Srinivasan
,
D.
Van Thourhout
,
R.
Van Deun
,
M.
Pantouvaki
,
J.
Van Campenhout
, and
R.
Loo
, “
Enhanced active P doping by using high order Ge precursors leading to intense photoluminescence
,”
Thin Solid Films
602
,
56
59
(
2016
).
7.
R. E.
Camacho-Aguilera
,
Y.
Cai
,
N.
Patel
,
J. T.
Bessette
,
M.
Romagnoli
,
L. C.
Kimerling
, and
J.
Michel
, “
An electrically pumped germanium laser
,”
Opt. Express
20
,
11316
11320
(
2012
).
8.
R.
Koerner
,
M.
Oehme
,
M.
Gollhofer
,
M.
Schmid
,
K.
Kostecki
,
S.
Bechler
,
D.
Widmann
,
E.
Kasper
, and
J.
Schulze
, “
Electrically pumped lasing from Ge Fabry-Perot resonators on Si
,”
Opt. Express
23
,
14815
14822
(
2015
).
9.
M. R.
Barget
,
M.
Virgilio
,
G.
Capellini
,
Y.
Yamamoto
, and
T.
Schroeder
, “
The impact of donors on recombination mechanisms in heavily doped Ge/Si layers
,”
J. Appl. Phys.
121
,
245701
(
2017
).
10.
Y.
Yamamoto
,
L.-W.
Nien
,
G.
Capellini
,
M.
Virgilio
,
I.
Costina
,
M. A.
Schubert
,
W.
Seifert
,
A.
Srinivasan
,
R.
Loo
,
G.
Scappucci
 et al., “
Photoluminescence of phosphorus atomic layer doped Ge grown on Si
,”
Semicond. Sci. Technol.
32
,
104005
(
2017
).
11.
L.
Ding
,
A. E.-J.
Lim
,
J. T.-Y.
Liow
,
M.
Yu
, and
G.-Q.
Lo
, “
Dependences of photoluminescence from P-implanted epitaxial Ge
,”
Opt. Express
20
,
8228
8239
(
2012
).
12.
R.
Camacho-Aguilera
,
Z.
Han
,
Y.
Cai
,
L. C.
Kimerling
, and
J.
Michel
, “
Direct bandgap narrowing in highly doped Ge
,”
Appl. Phys. Lett.
102
,
152106
(
2013
).
13.
M.
Oehme
,
M.
Gollhofer
,
D.
Widmann
,
M.
Schmid
,
M.
Kaschel
,
E.
Kasper
, and
J.
Schulze
, “
Direct bandgap narrowing in Ge LED's on Si substrates
,”
Opt. Express
21
,
2206
2211
(
2013
).
14.
S. L.
Chuang
,
Physics of Photonic Devices
(
John Wiley & Sons
,
2012
), Vol.
80
.
15.
J.
Liu
,
X.
Sun
,
D.
Pan
,
X.
Wang
,
L. C.
Kimerling
,
T. L.
Koch
, and
J.
Michel
, “
Tensile-strained, n-type Ge as a gain medium for monolithic laser integration on Si
,”
Opt. Express
15
,
11272
11277
(
2007
).
16.
V. R.
D'Costa
,
Y.
Fang
,
J.
Mathews
,
R.
Roucka
,
J.
Tolle
,
J.
Menéndez
, and
J.
Kouvetakis
, “
Sn-alloying as a means of increasing the optical absorption of Ge at the C-and L-telecommunication bands
,”
Semicond. Sci. Technol.
24
,
115006
(
2009
).
17.
L.
Pavesi
and
M.
Guzzi
, “
Photoluminescence of AlxGa1−x as alloys
,”
J. Appl. Phys.
75
,
4779
4842
(
1994
).
18.
S. M.
Sze
and
K. K.
Ng
,
Physics of Semiconductor Devices
(
John Wiley & Sons
,
2006
).
19.
M.
Virgilio
,
D.
Sabbagh
,
M.
Ortolani
,
L.
Di Gaspare
,
G.
Capellini
, and
M.
De Seta
, “
Physical mechanisms of intersubband-absorption linewidth broadening in S-Ge/SiGe quantum wells
,”
Phys. Rev. B
90
,
155420
(
2014
).
20.
O.
Svelto
and
D. C.
Hanna
,
Principles of Lasers, Vol. 4
(
Plenum Press
,
1998
).
21.
M.
Virgilio
,
C.
Manganelli
,
G.
Grosso
,
T.
Schroeder
, and
G.
Capellini
, “
Photoluminescence, recombination rate, and gain spectra in optically excited n-type and tensile strained germanium layers
,”
J. Appl. Phys.
114
,
243102
(
2013
).
22.
L.
Carroll
,
P.
Friedli
,
S.
Neuenschwander
,
H.
Sigg
,
S.
Cecchi
,
F.
Isa
,
D.
Chrastina
,
G.
Isella
,
Y.
Fedoryshyn
, and
J.
Faist
, “
Direct-gap gain and optical absorption in germanium correlated to the density of photoexcited carriers, doping, and strain
,”
Phys. Rev. Lett.
109
,
057402
(
2012
).
23.
R.
Geiger
,
T.
Zabel
,
E.
Marin
,
A.
Gassenq
,
J.-M.
Hartmann
,
J.
Widiez
,
J.
Escalante
,
K.
Guilloy
,
N.
Pauc
,
D.
Rouchon
 et al., “
Uniaxially stressed germanium with fundamental direct bandgap
,” eprint arXiv:1603.03454 (
2015
).
24.
R.
Geiger
, “
Direct bandgap germanium for Si-compatible lasing
,” Ph.D. thesis (Eidgenössische Technische Hochschule Zürich,
2016
).
25.
R.
Geiger
,
J.
Frigerio
,
M.
Süess
,
D.
Chrastina
,
G.
Isella
,
R.
Spolenak
,
J.
Faist
, and
H.
Sigg
, “
Excess carrier lifetimes in Ge layers on Si
,”
Appl. Phys. Lett.
104
,
062106
(
2014
).
26.
S. A.
Srinivasan
,
M.
Pantouvaki
,
P.
Verheyen
,
G.
Lepage
,
P.
Absil
,
J.
Van Campenhout
, and
D.
Van Thourhout
, “
Extraction of carrier lifetime in Ge waveguides using pump probe spectroscopy
,”
Appl. Phys. Lett.
108
,
211101
(
2016
).
27.
A.
Ghrib
,
M.
El Kurdi
,
M.
Prost
,
S.
Sauvage
,
X.
Checoury
,
G.
Beaudoin
,
M.
Chaigneau
,
R.
Ossikovski
,
I.
Sagnes
, and
P.
Boucaud
, “
All-around SiN stressor for high and homogeneous tensile strain in germanium microdisk cavities
,”
Adv. Opt. Mater.
3
,
353
358
(
2015
).
28.
M.
Prost
,
M.
El Kurdi
,
F.
Aniel
,
N.
Zerounian
,
S.
Sauvage
,
X.
Checoury
,
F.
Bœuf
, and
P.
Boucaud
, “
Analysis of optical gain threshold in n-doped and tensile-strained germanium heterostructure diodes
,”
J. Appl. Phys.
118
,
125704
(
2015
).
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