The impact of nitridation on open spaces in thin AlONx films deposited by a reactive sputtering technique was studied by using monoenergetic positron beams. For AlONx films with x = 0%–15%, positrons were found to annihilate from trapped states in open spaces, which coexist intrinsically in an amorphous structure with three different sizes. Nitrogen incorporation into the Al2O3 film increased the size of the open spaces, and their density increased as the post-deposition annealing temperature increased. The effect of nitrogen incorporation, however, diminished at x = 25%. The observed change in the network structure was associated with the formation of a stable amorphous structure, which we could relate to the electrical properties of AlONx/SiO2/Si gate stacks.

1.
J.
Robertson
,
Eur. Phys. J.: Appl. Phys.
28
,
265
(
2004
).
2.
M. D.
Groner
,
J. W.
Elam
,
F. H.
Fabreguette
, and
S. M.
George
,
Thin Solid Films
413
,
186
(
2002
).
3.
K.
Manabe
,
K.
Endo
,
S.
Kamiyama
,
T.
Iwamoto
,
T.
Ogura
,
N.
Ikarashi
,
T.
Yamamoto
, and
T.
Tatsumi
,
IEICE Trans. Electron.
E87-C
,
30
(
2004
).
4.
Y.
Hori
,
C.
Mizue
, and
T.
Hashizume
,
Jpn. J. Appl. Phys.
49
,
080201
(
2010
).
5.
R.
Asahara
,
M.
Nozaki
,
T.
Yamada
,
J.
Ito
,
S.
Nakazawa
,
M.
Ishida
,
T.
Ueda
,
A.
Yoshigoe
,
T.
Hosoi
,
T.
Shimura
, and
H.
Watanabe
,
Appl. Phys. Express
9
,
101002
(
2016
).
6.
W.
Takeuchi
,
K.
Yamamoto
,
M.
Sakashita
,
O.
Nakatsuka
, and
S.
Zaima
,
Jpn. J. Appl. Phys.
57
,
01AE06
(
2018
).
7.
R.
Krause-Rehberg
and
H. S.
Leipner
,
Positron Annihilation in Semiconductors, Solid-State Sciences
(
Springer-Verlag
,
Berlin
,
1999
), Vol.
127
.
8.
Principle and Application of Positron and Positronium Chemistry
, edited by
Y. C.
Jean
and
D. M.
Schrader
(
World Scientific
,
Singapore
,
2003
), p.
167
.
9.
K.
Watanabe
,
M.
Nozaki
,
T.
Yamada
,
S.
Nakazawa
,
Y.
Anda
,
M.
Ishida
,
T.
Ueda
,
A.
Yoshigoe
,
T.
Hosoi
,
T.
Shimura
, and
H.
Watanabe
,
Appl. Phys. Lett.
111
,
042102
(
2017
).
10.
A.
van Veen
,
H.
Schut
,
M.
Clement
,
J. M. M.
de Nijs
,
A.
Kruseman
, and
M. R.
IJpma
,
Appl. Surf. Sci.
85
,
216
(
1995
).
11.
P.
Sperr
,
W.
Egger
,
G.
Kögel
,
G.
Dollinger
,
C.
Hugenschmidt
,
R.
Repper
, and
C.
Piochacz
,
Appl. Surf. Sci.
255
,
35
(
2008
).
12.
P.
Kirkegaard
,
M.
Eldrup
,
O. E.
Mogensen
, and
N. J.
Pedersen
,
Comput. Phys. Commun.
23
,
307
(
1981
).
13.
K.
Iwamoto
,
Y.
Kamimuta
,
A.
Ogawa
,
Y.
Watanabe
,
S.
Migita
,
W.
Mizubayashi
,
Y.
Morita
,
M.
Takahashi
,
H.
Ota
,
T.
Nabatame
, and
A.
Toriumi
,
Appl. Phys. Lett.
92
,
132907
(
2008
).
14.
K.
Kita
and
A.
Toriumi
,
Appl. Phys. Lett.
94
,
132902
(
2009
).
15.
A.
Uedono
,
K.
Ikeuchi
,
K.
Yamabe
,
T.
Ohdaira
,
M.
Muramatsu
,
R.
Suzuki
,
A. S.
Hamid
,
T.
Chikyow
,
K.
Torii
, and
K.
Yamada
,
J. Appl. Phys.
98
,
023506
(
2005
).
16.
K.
Kimoto
,
Y.
Matsui
,
T.
Nabatame
,
T.
Yasuda
,
T.
Mizoguchi
,
I.
Tanaka
, and
A.
Toriumi
,
Appl. Phys. Lett.
83
,
4306
(
2003
).
17.
A.
Uedono
,
T.
Nabatame
,
W.
Egger
,
T.
Koschine
,
C.
Hugenschmidt
,
M.
Dickmann
,
M.
Sumiya
, and
S.
Ishibashi
,
J. Appl. Phys.
123
,
155302
(
2018
).
18.
A.
Uedono
,
K.
Ikeuchi
,
T.
Otsuka
,
K.
Shiraishi
,
S.
Miyazaki
,
N.
Umezawa
,
A.
Hamid
,
T.
Chikyow
,
T.
Ohdaira
,
M.
Muramatsu
,
R.
Suzuki
,
S.
Inumiya
,
S.
Kamiyama
,
Y.
Akasaka
,
Y.
Nara
, and
K.
Yamada
,
J. Appl. Phys.
99
,
054507
(
2006
).
You do not currently have access to this content.