A narrow zero-intensity spot arising from an x-ray vortex has huge potential for future applications such as nanoscopy and nanofabrication. We here present an X-ray Free Electron Laser (XFEL) experiment with a focused vortex wavefront which generated high aspect ratio nanoneedles on a Cr/Au multi-layer (ML) specimen. A sharp needle with a typical width and height of 310 and 600 nm was formed with a high occurrence rate at the center of a 7.71 keV x-ray vortex on this ML specimen, respectively. The observed width exceeds the diffraction limit, and the smallest structures ever reported using an intense-XFEL ablation were fabricated. We found that the elemental composition of the nanoneedles shows a significant difference from that of the unaffected area of Cr/Au ML. All these results are well explained by the molecular dynamics simulations, leading to the elucidation of the needle formation mechanism on an ultra-fast timescale.

1.
C.
Phipps
,
Laser Ablation and its Applications
, Springer Series in Optical Sciences Vol. 129 (
Springer
,
2007
).
2.
B.
Rethfeld
,
D. S.
Ivanov
,
M. E.
Garcia
, and
S. I.
Anisimov
,
J. Phys. D: Appl. Phys.
50
,
193001
(
2017
).
3.
E.
Gamaly
,
Femtosecond Laser–Matter Interactions: Theory, Experiments, and Applications
(
Pan Stanford Publishing
,
2011
).
4.
T.
Koyama
,
H.
Yumoto
,
Y.
Senba
,
K.
Tono
,
T.
Sato
,
T.
Togashi
,
Y.
Inubushi
,
T.
Katayama
,
J.
Kim
,
S.
Matsuyama
 et al,
Opt. Express
21
,
15382
(
2013
).
5.
M.
Padgett
,
J.
Courtial
, and
L.
Allen
,
Phys. Today
57
(
5
),
35
(
2004
).
6.
K.
Toyoda
,
F.
Takahashi
,
S.
Takizawa
,
Y.
Tokizane
,
K.
Miyamoto
,
R.
Morita
, and
T.
Omatsu
,
Nano Lett.
12
,
3645
(
2012
).
7.
A.
Ambrosio
,
L.
Marrucci
,
F.
Borbone
,
A.
Roviello
, and
P.
Maddalena
,
Nat. Commun.
3
,
989
(
2012
).
8.
K.
Toyoda
,
F.
Takahashi
,
S.
Takizawa
,
Y.
Tokizane
,
K.
Miyamoto
,
R.
Morita
, and
T.
Omatsu
,
Phys. Rev. Lett.
110
(
14
),
143603
(
2013
).
9.
F.
Takahashi
,
K.
Miyamoto
,
H.
Hidai
,
K.
Yamane
,
R.
Morita
, and
T.
Omatsu
,
Sci. Rep.
6
,
21738
(
2016
).
10.
P.
Emma
,
R.
Akre
,
J.
Arthur
,
R.
Bionta
,
C.
Bostedt
,
J.
Bozek
,
A.
Brachmann
,
P.
Bucksbaum
,
R.
Coffee
,
F.
Decker
 et al,
Nat. Photonics
4
,
641
(
2010
).
11.
T.
Ishikawa
,
H.
Aoyagi
,
T.
Asaka
,
Y.
Asano
,
N.
Azumi
,
T.
Bizen
,
H.
Ego
,
K.
Fukami
,
T.
Fukui
,
Y.
Furukawa
 et al,
Nat. Photonics
6
,
540
(
2012
).
12.
G. F.
Knoll
,
Radiation Detection and Measurement
(
John Wiley & Sons, Inc
.,
1989
).
13.
A.
Sakdinawat
and
Y.
Liu
,
Opt. Lett.
32
,
2635
(
2007
).
14.
K.
Inoue
,
T.
Oka
,
T.
Suzuki
,
N.
Yagi
,
K.
Takeshita
,
S.
Goto
, and
T.
Ishikawa
,
Nucl. Instrum. Methods Phys. Res.
467–468
,
674
(
2001
).
15.
S.
Kimura
,
Y.
Moritomo
,
Y.
Tanaka
,
H.
Tanaka
,
K.
Toriumi
,
K.
Kato
,
N.
Yasuda
,
Y.
Fukuyama
,
J.
Kim
,
H.
Murayama
 et al,
AIP Conf. Proc.
879
,
1238
(
2007
).
16.
Y.
Suzuki
,
K.
Uesugi
,
N.
Takimoto
,
T.
Fukui
,
K.
Aoyama
,
A.
Takeuchi
,
H.
Takano
,
N.
Yagi
,
T.
Mochizuki
,
S.
Goto
 et al,
AIP Conf. Proc.
705
,
344
(
2004
).
17.
K.
Tamasaku
,
Y.
Tanaka
,
M.
Yabashi
,
H.
Yamazaki
,
N.
Kawamura
,
M.
Suzuki
, and
T.
Ishikawa
,
Nucl. Instrum. Methods Phys. Res. A
467–468
,
686
(
2001
).
18.

The electron ranges of 15 keV probes in the EDX are 1.1 and 0.5 μm on Cr and Au layers, respectively, according to the formula in Goldstein et al.19 The attenuation lengths of Cr Kα and Au Lα fluorescent lines are 0.9 and 4 μm, respectively, for Au layers, and are significantly larger for Cr layers.20 

19.
J.
Goldstein
,
D.
Newbury
,
D.
Joy
,
C.
Lyman
,
P.
Echlin
,
E.
Lifshin
,
L.
Sawyer
, and
J.
Michael
,
Scanning Electron Microscopy and X-Ray Microanalysis
, 8th ed. (
Springer
,
New York
,
2003
).
20.
B.
Henke
,
E.
Gullikson
, and
J.
Davis
,
At. Data Nucl. Data Tables
54
(
2
),
181
(
1993
).
21.
N. A.
Inogamov
,
V. V.
Zhakhovsky
,
V. A.
Khokhlov
,
Y. V.
Petrov
, and
K. P.
Migdal
,
Nanoscale Res. Lett.
11
,
177
(
2016
).
22.
V. V.
Zhakhovskii
,
N. A.
Inogamov
,
Y. V.
Petrov
,
S. I.
Ashitkov
, and
K.
Nishihara
,
Appl. Surf. Sci.
255
,
9592
(
2009
).
23.
B.
Demaske
,
V. V.
Zhakhovsky
,
N. A.
Inogamov
, and
I. I.
Oleynik
,
Phys. Rev. B
82
,
064113
(
2010
).
24.
The vapor pressure is initially on the order of 0.1 GPa and decreases quickly by the bubble inflation. The contractive pressure by the liquid surface tension, expressed as pi = σ/Ri where σ and Ri are the surface tension of liquid Cr and the inner radius of torus, respectively, becomes as large as pi ≥ 0.1 GPa for Ri ≤ 10 nm.
25.
S. W.
Hell
and
J.
Wichmann
,
Opt. Lett.
19
,
780
(
1994
).
26.
S.
Hell
,
Nat. BioTechnol.
21
,
1347
(
2003
).
27.
W. E.
Moerner
and
L.
Kador
,
Phys. Rev. Lett.
62
(
21
),
2535
(
1989
).

Supplementary Material

You do not currently have access to this content.