Contactless characterization of mechanical resonances using Fabry-Perot interferometry is a powerful tool to study the mechanical and dynamical properties of atomically thin membranes. However, amplitude calibration is often not performed or only possible by making assumptions on the device parameters such as its mass or the temperature. In this work, we demonstrate a calibration technique that directly measures the oscillation amplitude by detecting higher harmonics that arise from nonlinearities in the optical transduction. Employing this technique, we calibrate the resonance amplitude of two-dimensional nanomechanical resonators, without requiring knowledge of their mechanical properties, actuation force, geometric distances, or the laser intensity.
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18 December 2017
Research Article|
December 19 2017
Amplitude calibration of 2D mechanical resonators by nonlinear optical transduction
Robin J. Dolleman;
Robin J. Dolleman
a)
1
Kavli Institute of Nanoscience, Delft University of Technology
, Lorentzweg 1, 2628 CJ Delft, The Netherlands
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Dejan Davidovikj
;
Dejan Davidovikj
1
Kavli Institute of Nanoscience, Delft University of Technology
, Lorentzweg 1, 2628 CJ Delft, The Netherlands
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Herre S. J. van der Zant;
Herre S. J. van der Zant
1
Kavli Institute of Nanoscience, Delft University of Technology
, Lorentzweg 1, 2628 CJ Delft, The Netherlands
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Peter G. Steeneken
Peter G. Steeneken
1
Kavli Institute of Nanoscience, Delft University of Technology
, Lorentzweg 1, 2628 CJ Delft, The Netherlands
2
Department of Precision and Microsystems Engineering, Delft University of Technology
, Mekelweg 2, 2628 CD Delft, The Netherlands
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Appl. Phys. Lett. 111, 253104 (2017)
Article history
Received:
October 20 2017
Accepted:
December 06 2017
Citation
Robin J. Dolleman, Dejan Davidovikj, Herre S. J. van der Zant, Peter G. Steeneken; Amplitude calibration of 2D mechanical resonators by nonlinear optical transduction. Appl. Phys. Lett. 18 December 2017; 111 (25): 253104. https://doi.org/10.1063/1.5009909
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