The sensing mechanism of nanowire field effect transistor (NWFET) biosensors is investigated by taking into consideration both the charge and dielectric effects of biomolecules. The dielectric effect of the biomolecules is dominantly reflected in the linear regime, whereas the charge property is manifested in the subthreshold regime. The findings are supported by bio-experiments and numerical simulations. This study provides a rudimentary means of understanding interactions between biomolecules and NWFET biosensors.
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