A family of silicon micro-sensors for Atomic Force Microscope (AFM) is presented that allows to operate with integrated transducers from medium to high frequencies together with moderate stiffness constants. The sensors are based on Micro-Electro-Mechanical-Systems technology. The vertical design specifically enables a long tip to oscillate perpendicularly to the surface to be imaged. The tip is part of a resonator including quasi-flexural composite beams, and symmetrical transducers that can be used as piezoresistive detector and/or electro-thermal actuator. Two vertical probes (Vprobes) were operated up to 4.3 MHz with stiffness constants 150 N/m to 500 N/m and the capability to oscillate from 10 pm to 90 nm. AFM images of several samples both in amplitude modulation (tapping-mode) and in frequency modulation were obtained.
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12 June 2017
Research Article|
June 12 2017
Atomic force microscope based on vertical silicon probes
Benjamin Walter;
Benjamin Walter
1
Vmicro SAS
, Avenue Poincaré, 59650 Villeneuve d'Ascq, France
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Estelle Mairiaux;
Estelle Mairiaux
1
Vmicro SAS
, Avenue Poincaré, 59650 Villeneuve d'Ascq, France
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Marc Faucher
Marc Faucher
1
Vmicro SAS
, Avenue Poincaré, 59650 Villeneuve d'Ascq, France
2
Institut d'Electronique, de Microélectronique et de Nanotechnologie, Univ. Lille
, CNRS UMR 8520 - IEMN, F-59000 Lille, France
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Benjamin Walter
1
Estelle Mairiaux
1
Marc Faucher
1,2
1
Vmicro SAS
, Avenue Poincaré, 59650 Villeneuve d'Ascq, France
2
Institut d'Electronique, de Microélectronique et de Nanotechnologie, Univ. Lille
, CNRS UMR 8520 - IEMN, F-59000 Lille, France
Appl. Phys. Lett. 110, 243101 (2017)
Article history
Received:
March 04 2017
Accepted:
April 24 2017
Citation
Benjamin Walter, Estelle Mairiaux, Marc Faucher; Atomic force microscope based on vertical silicon probes. Appl. Phys. Lett. 12 June 2017; 110 (24): 243101. https://doi.org/10.1063/1.4985125
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